AUTOMATIC POLISHING SYSTEM

To provide an automatic polishing system which can make a thickness of a polished film uniform during polishing processing.SOLUTION: An automatic polishing system includes a polishing tool which has a polishing material for polishing a polishing object area and a motor for driving the polishing mate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAYASHI KEIICHI, SUZUKI HIROYUKI, YAMASHITA TOMOO, NAKAYAMA GENJI, AZUMA YOSHIO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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