PRISM MECHANISM, PHOTOGRAPHING DEVICE, HOLDING MECHANISM AND PROCESSING DEVICE

To provide a new prism mechanism that enables an object to be photographed to be photographed from a position deviated at 90 degrees from the object by using a prism.SOLUTION: A prism mechanism P, which changes an advancing direction of light, comprises a prism main body 90, arranged to face an object to be photographed (a wafer W), which includes a reflection surface 90a that reflects reflected light (light H1) from the object to be photographed and changes an advancing direction of the reflected light (the light H1), a housing 84 that houses the prism main body 90, and a light source 92 that irradiates the object to be photographed with light H2. In the housing 84 are formed a first passage port 85a that allows the reflected light (the light H1) to pass therethrough while facing the object to be photographed and a second passage port 85b through which the reflected light (the light H1) whose advancing direction is changed by the prism main body 90 is guided to a photographing camera C.SELECTED DRAWING: Figure 3 【課題】 プリズムを用いることにより被撮像物と９０度ずれた位置からの撮像を可能とする新規なプリズム機構を提案する。【解決手段】 光の進行方向を変更するプリズム機構Ｐであって、被撮像物（ウェーハＷ）に対面して配設され、被撮像物からの反射光（光Ｈ１）を反射して反射光（光Ｈ１）の進行方向を変更させる反射面９０ａを含むプリズム本体９０と、プリズム本体９０を収容する筐体８４と、被撮像物に対して光Ｈ２を照射する光源９２と、を備え、筐体８４には、被撮像物に対面して反射光（光Ｈ１）の通過を許容する第一通過口８５ａと、プリズム本体９０で進行方向が変更された反射光（光Ｈ１）を撮像カメラＣに導く第二通過口８５ｂと、が形成される、プリズム機構Ｐとする。【選択図】図３