LENS ARRAY, LED ILLUMINATION UNIT, EXPOSURE DEVICE, AND EXPOSURE METHOD

To provide a lens array which can be stably assembled to an LED base plate, has excellent illuminance distribution, and can be downsized, an LED illumination unit, an exposure device, and an exposure method.SOLUTION: A lens array 50 includes a lens plate 51 and a plurality of lenses 52. The lens pla...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUSHITA TOMOTSUNE, YAMAGUCHI YOICHI, MATSUZAKA MASAAKI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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