SHAPE CHARACTERISTIC VALUE ESTIMATION DEVICE, SHAPE CHARACTERISTIC VALUE ESTIMATION METHOD, AND STORAGE MEDIUM

To estimate a characteristic value related to the shape of a film formed on an object substrate with higher accuracy.SOLUTION: A shape characteristic value estimation device includes: a processed image acquisition unit for acquiring a processed image including image information on the surface of a substrate with an object film formed thereon; an estimation unit for estimating a shape characteristic value by applying an estimation model for estimating a characteristic value of the object film related to a correlation between information on a color of a substrate surface included in the processed image and the shape characteristic value of the object film formed on the substrate to the processed image; a ground influence model creation unit for creating a ground influence model being a model related to a correlation between a difference between an estimation result of the shape characteristic value of the object film by the estimation unit and the shape characteristic value of the object film acquired without using the estimation model, and information on the color of the ground substrate surface included in a ground image being image information on the surface of the ground substrate before the object film is formed; and an estimation result correction unit for correcting the estimation result of the shape characteristic value of the object film by the estimation unit on the basis of the ground influence model.SELECTED DRAWING: Figure 4 【課題】対象基板に形成された膜の形状に係る特性値をより精度良く推定する。【解決手段】形状特性値推定装置は、対象膜が形成された基板の表面に係る画像情報を含む処理後画像を取得する処理後画像取得部と、処理後画像に含まれる基板表面の色に係る情報と当該基板に形成された対象膜の形状特性値との相関に係る、対象膜の形状特性値を推定するための推定モデルを、処理後画像に対して適用することで、形状特性値の推定を行う推定部と、推定部による対象膜の形状特性値の推定結果と推定モデルを用いずに取得される対象膜の形状特性値との差分と、対象膜が形成される前の下地基板の表面に係る画像情報である下地画像に含まれる下地基板表面の色に係る情報と、の相関に係るモデルである下地影響モデルを作成する下地影響モデル作成部と、下地影響モデルに基づいて、推定部による対象膜の形状特性値の推定結果を補正する推定結果補正部と、を有する。【選択図】図４