BEAM DELIVERY SYSTEM, FOCAL DISTANCE SELECTION METHOD, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
To provide a method for equalizing a beam spread angle of a pulse laser beam.SOLUTION: A beam delivery system is used for an extreme ultraviolet light generating device, arranged on an optical path between a laser device and a light collecting optical system, and is arranged on a propagation mirror...
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| creator | SUGANUMA TAKASHI TATSUMI TAKAHIRO |
| description | To provide a method for equalizing a beam spread angle of a pulse laser beam.SOLUTION: A beam delivery system is used for an extreme ultraviolet light generating device, arranged on an optical path between a laser device and a light collecting optical system, and is arranged on a propagation mirror which changes the propagation direction of a pulsed laser beam and on an optical path between the propagation mirror and a light collecting optical system and comprises a curvature mirror having a reflecting surface of a concave surface which makes pulse laser beam incident in the light collecting optical system into a focused beam, in which a beam spreading angle of the pulsed laser beam emitted from the curvature mirror is constant without depending on the thermal deformation of the propagating mirror or is constant by allowing variation within a predetermined allowable range, the focal distance of the curvature mirror is selected.SELECTED DRAWING: Figure 12
【課題】パルスレーザ光のビーム広がり角を一定化する方法を提供する。【解決手段】ビームデリバリシステムは、極端紫外光生成装置に用いられるものであり、レーザ装置と集光光学系との間の光路上に配置され、パルスレーザ光の伝搬方向を変える伝搬ミラーと、伝搬ミラーと集光光学系との間の光路上に配置され、集光光学系に入射させるパルスレーザ光を収束ビームにする凹面の反射面を持つ曲率ミラーと、を備え、曲率ミラーから出射されるパルスレーザ光のビーム広がり角が、伝搬ミラーの熱変形によらず、一定になるように、又は、所定の許容範囲内の変化を許容して一定になるように、曲率ミラーの焦点距離を選定したビームデリバリシステムである。【選択図】図１２ |
| format | Patent |
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【課題】パルスレーザ光のビーム広がり角を一定化する方法を提供する。【解決手段】ビームデリバリシステムは、極端紫外光生成装置に用いられるものであり、レーザ装置と集光光学系との間の光路上に配置され、パルスレーザ光の伝搬方向を変える伝搬ミラーと、伝搬ミラーと集光光学系との間の光路上に配置され、集光光学系に入射させるパルスレーザ光を収束ビームにする凹面の反射面を持つ曲率ミラーと、を備え、曲率ミラーから出射されるパルスレーザ光のビーム広がり角が、伝搬ミラーの熱変形によらず、一定になるように、又は、所定の許容範囲内の変化を許容して一定になるように、曲率ミラーの焦点距離を選定したビームデリバリシステムである。【選択図】図１２</description><language>eng ; jpn</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; BASIC ELECTRIC ELEMENTS ; CINEMATOGRAPHY ; DEVICES USING STIMULATED EMISSION ; ELECTRICITY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210527&DB=EPODOC&CC=JP&NR=2021081540A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210527&DB=EPODOC&CC=JP&NR=2021081540A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SUGANUMA TAKASHI</creatorcontrib><creatorcontrib>TATSUMI TAKAHIRO</creatorcontrib><title>BEAM DELIVERY SYSTEM, FOCAL DISTANCE SELECTION METHOD, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE</title><description>To provide a method for equalizing a beam spread angle of a pulse laser beam.SOLUTION: A beam delivery system is used for an extreme ultraviolet light generating device, arranged on an optical path between a laser device and a light collecting optical system, and is arranged on a propagation mirror which changes the propagation direction of a pulsed laser beam and on an optical path between the propagation mirror and a light collecting optical system and comprises a curvature mirror having a reflecting surface of a concave surface which makes pulse laser beam incident in the light collecting optical system into a focused beam, in which a beam spreading angle of the pulsed laser beam emitted from the curvature mirror is constant without depending on the thermal deformation of the propagating mirror or is constant by allowing variation within a predetermined allowable range, the focal distance of the curvature mirror is selected.SELECTED DRAWING: Figure 12
【課題】パルスレーザ光のビーム広がり角を一定化する方法を提供する。【解決手段】ビームデリバリシステムは、極端紫外光生成装置に用いられるものであり、レーザ装置と集光光学系との間の光路上に配置され、パルスレーザ光の伝搬方向を変える伝搬ミラーと、伝搬ミラーと集光光学系との間の光路上に配置され、集光光学系に入射させるパルスレーザ光を収束ビームにする凹面の反射面を持つ曲率ミラーと、を備え、曲率ミラーから出射されるパルスレーザ光のビーム広がり角が、伝搬ミラーの熱変形によらず、一定になるように、又は、所定の許容範囲内の変化を許容して一定になるように、曲率ミラーの焦点距離を選定したビームデリバリシステムである。【選択図】図１２</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CINEMATOGRAPHY</subject><subject>DEVICES USING STIMULATED EMISSION</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjLEKwjAUALs4iPoPD-cKaVVwfb682EiTSJMWOpWicRIt1P9HkX6A0w133Dy5HRkNSC51w1ULvvWBTQrKEZYgtQ9oicFzyRS0s2A4FE6mgFaCQVsrpFBX2p4mA07BL66c1fQdN5p4mczu_WOMq4mLZK04ULGJw6uL49Bf4zO-u_MlF3kmDtl-J3D7V_QBhWI0jw</recordid><startdate>20210527</startdate><enddate>20210527</enddate><creator>SUGANUMA TAKASHI</creator><creator>TATSUMI TAKAHIRO</creator><scope>EVB</scope></search><sort><creationdate>20210527</creationdate><title>BEAM DELIVERY SYSTEM, FOCAL DISTANCE SELECTION METHOD, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE</title><author>SUGANUMA TAKASHI ; TATSUMI TAKAHIRO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2021081540A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2021</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CINEMATOGRAPHY</topic><topic>DEVICES USING STIMULATED EMISSION</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>SUGANUMA TAKASHI</creatorcontrib><creatorcontrib>TATSUMI TAKAHIRO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SUGANUMA TAKASHI</au><au>TATSUMI TAKAHIRO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>BEAM DELIVERY SYSTEM, FOCAL DISTANCE SELECTION METHOD, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE</title><date>2021-05-27</date><risdate>2021</risdate><abstract>To provide a method for equalizing a beam spread angle of a pulse laser beam.SOLUTION: A beam delivery system is used for an extreme ultraviolet light generating device, arranged on an optical path between a laser device and a light collecting optical system, and is arranged on a propagation mirror which changes the propagation direction of a pulsed laser beam and on an optical path between the propagation mirror and a light collecting optical system and comprises a curvature mirror having a reflecting surface of a concave surface which makes pulse laser beam incident in the light collecting optical system into a focused beam, in which a beam spreading angle of the pulsed laser beam emitted from the curvature mirror is constant without depending on the thermal deformation of the propagating mirror or is constant by allowing variation within a predetermined allowable range, the focal distance of the curvature mirror is selected.SELECTED DRAWING: Figure 12
【課題】パルスレーザ光のビーム広がり角を一定化する方法を提供する。【解決手段】ビームデリバリシステムは、極端紫外光生成装置に用いられるものであり、レーザ装置と集光光学系との間の光路上に配置され、パルスレーザ光の伝搬方向を変える伝搬ミラーと、伝搬ミラーと集光光学系との間の光路上に配置され、集光光学系に入射させるパルスレーザ光を収束ビームにする凹面の反射面を持つ曲率ミラーと、を備え、曲率ミラーから出射されるパルスレーザ光のビーム広がり角が、伝搬ミラーの熱変形によらず、一定になるように、又は、所定の許容範囲内の変化を許容して一定になるように、曲率ミラーの焦点距離を選定したビームデリバリシステムである。【選択図】図１２</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES USING STIMULATED EMISSION ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | BEAM DELIVERY SYSTEM, FOCAL DISTANCE SELECTION METHOD, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE |
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