METHOD FOR CALCULATING TEMPERATURE

To provide a method for calculating the temperature of, for example, a vacuum pump, especially a turbo molecular pump, by using an IR sensor system.SOLUTION: The method includes: measuring a first temperature Tobs,1 at a measurement position; generating a reference temperature Tref in a reference po...

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Bibliographische Detailangaben
Hauptverfasser:	ADRIAN WIRTH, JUERGEN WISSNER, JOHANNES SCHNARR
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BLASTING COLORIMETRY HEATING LIGHTING MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS PHYSICS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS RADIATION PYROMETRY TESTING WEAPONS
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Beschreibung
Zusammenfassung:	To provide a method for calculating the temperature of, for example, a vacuum pump, especially a turbo molecular pump, by using an IR sensor system.SOLUTION: The method includes: measuring a first temperature Tobs,1 at a measurement position; generating a reference temperature Tref in a reference position by a heat source; measuring a second temperature Tobs,2 in the reference position; comparing the second temperature Tobs,2 with an expected temperature Texp generated from the reference temperature Tref; and correcting the first temperature Tobs,1 on the basis of a deviation when the second temperature Tobs,2 deviates from the expected temperature Texp.SELECTED DRAWING: Figure 1 【課題】本発明は、ＩＲセンサシステムを用いて、例えば真空ポンプの、特にターボ分子ポンプの温度を算出するための方法を提供すること。【解決手段】この方法は、第１の温度Ｔｏｂｓ，１が測定位置で測定され、基準温度Ｔｒｅｆが基準位置で熱源によって発生され、第２の温度Ｔｏｂｓ，２が基準位置で測定され、第２の温度Ｔｏｂｓ，２が基準温度Ｔｒｅｆから生じる期待温度Ｔｅｘｐと比較され、及び期待温度Ｔｅｘｐから第２の温度Ｔｏｂｓ，２がずれる場合には、第１の温度Ｔｏｂｓ，１が偏差に基づいて修正される。【選択図】図１