HELIUM RECOVERY/PURIFICATION SYSTEM

To provide a helium recovery/purification system capable of selectively recovering helium gas from exhaust discharged from a CVD device and supplying the CVD device with the helium gas as recycle gas.SOLUTION: The helium recovery/purification system comprises a compressor 20 compressing gas to be tr...

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Bibliographische Detailangaben
Hauptverfasser:	KOURA TERUMASA, UNO CHIKAKO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide a helium recovery/purification system capable of selectively recovering helium gas from exhaust discharged from a CVD device and supplying the CVD device with the helium gas as recycle gas.SOLUTION: The helium recovery/purification system comprises a compressor 20 compressing gas to be treated to a specified pressure value, a moisture discharge unit 30 discharging moisture from the gas to be treated compressed by the compressor 20, an adsorption unit 40 that is disposed downstream relative to the moisture discharge unit 30 and is used to further remove the moisture at least, and a separation membrane module 60 at least comprising a plurality of inorganic separation membranes to separate the gas to be treated removed of moisture by the adsorption unit 40 into permeable gas containing high purity helium gas, and impermeable gas.SELECTED DRAWING: Figure 1 【課題】ＣＶＤ装置から排出された排出ガスからヘリウムガスを選択的に回収し、ＣＶＤ装置へ、そのヘリウムガスをリサイクルガスとして供給することができる、へリウム回収精製システムを提供する。【解決手段】へリウム回収精製システムは、被処理ガスを所定圧力値まで圧縮するコンプレッサー２０と、コンプレッサー２０で圧縮された被処理ガスから水分を排出する水分排出部３０と、水分排出部３０の下流に配置され、さらに少なくとも水分を除去するための吸着部４０と、少なくとも無機系分離膜を複数有し、吸着部４０で水分除去処理された被処理ガスを、高純度ヘリウムガスを含む透過ガスと非透過ガスに分離する分離膜モジュール６０を備える。【選択図】図１