INSPECTION DEVICE

To provide an inspection device that can estimate the amount of defocus from one image or a very small number of images.SOLUTION: An inspection device includes a charged particle beam source 401 that emits a charged particle beam, a charged particle optical system including a plurality of lenses 403...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TAKAHASHI NORIJI, HAYATA YASUNARI, SHINTANI ATSUKO, KOYAMA HIKARI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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