DIVISION DEVICE

To correctly set an expanded amount if a chip interval is expanded by expanding a tape.SOLUTION: In a division device 1, a table 30 comprises: a transparent plate 300 having a suction port communicating an upper surface and a suction source so as to make the upper surface function as a holding surface; a support base 301 in the transparent plate 300; a lower illumination 302 that is distributed between the transparent plate 300 and the base 301 to illuminate the holding surface, and comprises: a storage part 90 that stores a coupling image GA indicating an upper surface of a processing material, obtained by coupling a plurality of imaging images formed by a part where the upper surface of the processed material in which a lower illumination 302 is illuminated and a calf is formed in imaging means 62 is imaged to form an image, and a light of the lower illumination 302 is penetrated and imaged in white and a part where the light of the lower illumination 302 is blocked with the processed material and is imaged in black; and a calculation part 92 that calculates an expand amount for expanding an interval between chips which having a device on the basis of the number of pixels of a white part of the coupling image GA stored in the image storage part 90.SELECTED DRAWING: Figure 1 【課題】テープエキスパンドしてチップ間隔を広げる場合、エキスパンド量が正しく設定されるようにする。【解決手段】テーブル３０は、上面を保持面として機能させるように上面と吸引源とを連通させる吸引口を備える透明プレート３００と、透明プレート３００を支持基台３０１と、透明プレート３００と基台３０１との間に配設され保持面を照らす下照明３０２と、を備え、下照明３０２が点灯され撮像手段６２でカーフが形成され分割された被加工物の上面が撮像され画像が形成されていき、下照明３０２の光が透過し白く撮像された部分と下照明３０２の光が被加工物で遮光され黒く撮像された部分とからなる複数の撮像画像を結合した被加工物上面を示す結合画像ＧＡを記憶する記憶部９０と、画像記憶部９０に記憶された結合画像ＧＡの白部分のピクセル数により、デバイスを備えるチップとチップとの間隔を広げるエキスパンド量を算出する算出部９２と、を備える分割装置１。【選択図】図１