THIN FILM MAGNETOSTRICTOR AND METHOD FOR MANUFACTURING THE SAME
To provide a thin film magnetostrictor having a high magnetic strain λs even if being applied to a thin film having a small thickness.SOLUTION: A thin film magnetostrictor has a thin film. The thin film contains Fe, Co, Tb and O primarily. The thin film has a surface-inclined composition film, an in...
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Format: | Patent |
Sprache: | eng ; jpn |
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