SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND METHOD FOR ALIGNING PLACEMENT TABLE

To provide a substrate processing device that allows the position of a placement table to be adjusted relatively easily.SOLUTION: A substrate processing device includes: a plurality of placement tables where respective substrates to be processed are placed; a plurality of columns for supporting the respective placement tables from the lower surface sides; and a common base part for supporting the plurality of columns from the basal end sides. A position adjusting mechanism is provided between the base part and each of the columns, and has: a fixing member on a base part side; a position adjusting member for adjusting the position of the placement table by positioning the basal end section of the column, the position adjusting member being disposed above the fixing member; and a plurality of gap-height adjusting parts that are provided at at least three respective locations surrounding the periphery of the column and that attach the position adjusting member to the fixing member in a state in which the height of a gap between the fixing member and the position adjusting member can be adjusted. At least one position adjusting mechanism of the plurality of position adjusting mechanisms has, at one location, a fixing mounting part that attaches the position adjusting member to the fixing member in a state in which the height of the gap is fixed.SELECTED DRAWING: Figure 2 【課題】比較的簡便に載置台の位置調節を行うことが可能な基板処理装置を提供する。【解決手段】基板処理装置は、処理対象の基板が各々載置される複数の載置台と、各載置台を下面側から支持する複数の支柱と、複数の支柱を基端側から支持する共通の基台部を備える。位置調節機構は、基台部と各支柱との間に設けられ、基台部側の固定部材と、その上方に配置され、支柱の基端部を位置決めして載置台の位置を調節するための位置調節部材と、支柱の周囲を囲む少なくとも３箇所に各々設けられ、固定部材と位置調節部材との隙間の高さを調節可能な状態で、位置調節部材を固定部材に対して取り付ける複数の隙間高さ調節部と、を有する。複数の位置調節機構の少なくとも１つの位置調節機構は、１箇所にて、前記隙間の高さを固定した状態で位置調節部材を固定部材に対して取り付ける固定取付け部が設けられている。【選択図】図２