CONVEYANCE SYSTEM, CONVEYANCE METHOD, DEVICE MANUFACTURING APPARATUS, AND DEVICE MANUFACTURING METHOD

To prevent a positional deviation of a processing body at the time of movement of a conveyance robot.SOLUTION: A device manufacturing apparatus includes a conveyance system including: a conveyance robot 14 for conveying a processing body (mask M) loaded on a robot hand part 24; a control unit for co...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SAKAGAMI YUSUKE, HOSHINO TAKAO, SHIOIRI NOBURO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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