DISPLACEMENT MEASUREMENT DEVICE

To provide a displacement measurement device which can measure the angular displacement and the shaft displacement.SOLUTION: A mirror 3 having a reflection part that is narrowed in the spot shape is provided on a measurement target 2, and a one-dimensional grating 3a is arranged so as to be superimp...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ANZAI JOJI, TAJIMA DAICHI, IWASHITA JUN
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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