ELECTRON MICROSCOPE
To provide an electron microscope including an X-ray detector mounted thereon, the electron microscope being high in detection efficiency of X-rays.SOLUTION: An electron microscope 100 includes: a sample holder 13 which holds a sample S; an EDS detector 18 which detects an X-ray generated by irradia...
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| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide an electron microscope including an X-ray detector mounted thereon, the electron microscope being high in detection efficiency of X-rays.SOLUTION: An electron microscope 100 includes: a sample holder 13 which holds a sample S; an EDS detector 18 which detects an X-ray generated by irradiating a sample S with an electron beam; an EDS detector drive unit 19 which moves the EDS detector 18; and an EDS controller 32 as a control unit to control the EDS detector drive unit 19. The control unit controls the EDS detector drive unit 19 such that the EDS detector 18 moves depending on the position of the sample holder 13.SELECTED DRAWING: Figure 1
【課題】Ｘ線検出器が搭載された電子顕微鏡であって、Ｘ線の検出効率が高い電子顕微鏡を提供する。【解決手段】電子顕微鏡１００は、試料Ｓを保持する試料ホルダー１３と、試料Ｓに電子線を照射することにより発生するＸ線を検出するＥＤＳ検出器１８と、ＥＤＳ検出器１８を移動させるＥＤＳ検出器駆動装置１９と、ＥＤＳ検出器駆動装置１９を制御する制御部としてのＥＤＳコントローラ３２と、を含み、制御部は、試料ホルダー１３の位置に応じて、ＥＤＳ検出器１８が移動するようにＥＤＳ検出器駆動装置１９を制御する。【選択図】図１ |
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