FAN SCRUBBER AND CONTROL METHOD OF FAN SCRUBBER

To provide a fan scrubber capable of suppressing the corrosion of an inlet pipe.SOLUTION: According to an embodiment, a fan scrubber comprises: an inlet pipe connected to the subsequent stage side of a vacuum pump installed with a deposition device in a front stage; a treatment chamber being connect...

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Bibliographische Detailangaben
1. Verfasser:	TSUJIGUCHI YUKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	To provide a fan scrubber capable of suppressing the corrosion of an inlet pipe.SOLUTION: According to an embodiment, a fan scrubber comprises: an inlet pipe connected to the subsequent stage side of a vacuum pump installed with a deposition device in a front stage; a treatment chamber being connected to the inlet pipe and storing a fan connected to the main shaft of a motor; a heater heating the inlet pipe; and a control unit controlling the on/off of the heater. The control unit turns off the heater when a signal received from the deposition device is switched from a deposition signal to a cleaning signal.SELECTED DRAWING: Figure 4 【課題】入口配管の腐食を抑制することができるファンスクラバを提供する。【解決手段】実施形態によれば、前段に成膜装置が設置された真空ポンプの後段側に接続される入口配管と、前記入口配管に接続され、モータの主軸に接続されるファンを格納する処理室と、前記入口配管を加熱するヒータと、前記ヒータのオン／オフを制御する制御部と、を備えるファンスクラバが提供される。前記制御部は、前記成膜装置から受信する信号が成膜信号からクリーニング信号に切り替わった時に、前記ヒータをオフにする。【選択図】図４