POLISHING SHEET

To provide a polishing sheet that is suited for mirror polishing, and capable of obtaining a mirror plane of higher quality, that is a mirror plane with high specular in-plane uniformity and less flaws, in silicon bare wafers, glass, compound semiconductor substrates and hard disk substrates or the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIRO KUNIYASU, TERADA KOHEI, WADA MASAHARU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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