HEATING METHOD OF ULTRAPURE WATER
To provide a heating method of ultrapure water which can reduce heat source cost of a heat exchanger for heating ultrapure water delivered to a use point to produce warm ultrapure water.SOLUTION: Secondary pure water from a sub system 4 is heated in a heat exchanger 6, a heat exchanger 10 and a heat...
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| creator | HORII SHIGEKI |
| description | To provide a heating method of ultrapure water which can reduce heat source cost of a heat exchanger for heating ultrapure water delivered to a use point to produce warm ultrapure water.SOLUTION: Secondary pure water from a sub system 4 is heated in a heat exchanger 6, a heat exchanger 10 and a heat exchanger 12, and is delivered to a use point. A heat source of the heat exchanger 6 is return warm ultrapure water from the use point. In the heat exchanger 10, medium water heated in a heater 40 is circulated. According to an ultrapure water use amount at the use point, a pump 46 for medium water circulation is inverter-controlled, and a bypass flow rate is controlled by a three-way valve 43.SELECTED DRAWING: Figure 1
【課題】ユースポイントに送水される超純水を加温して温超純水とするための熱交換器の熱源コストを低減することができる超純水加熱方法を提供する。【解決手段】サブシステム４からの二次純水を熱交換器６、熱交換器１０及び熱交換器１２で加熱してユースポイントへ送る。熱交換器６の熱源はユースポイントからの戻り温超純水である。熱交換器１０には、加熱器４０で加熱された媒体水が循環通水される。ユースポイントの超純水使用量に応じて、媒体水循環用のポンプ４６をインバータ制御すると共に、バイパス流量を三方弁４３によって制御する。【選択図】図１ |
| format | Patent |
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【課題】ユースポイントに送水される超純水を加温して温超純水とするための熱交換器の熱源コストを低減することができる超純水加熱方法を提供する。【解決手段】サブシステム４からの二次純水を熱交換器６、熱交換器１０及び熱交換器１２で加熱してユースポイントへ送る。熱交換器６の熱源はユースポイントからの戻り温超純水である。熱交換器１０には、加熱器４０で加熱された媒体水が循環通水される。ユースポイントの超純水使用量に応じて、媒体水循環用のポンプ４６をインバータ制御すると共に、バイパス流量を三方弁４３によって制御する。【選択図】図１</description><language>eng ; jpn</language><subject>BLASTING ; CHEMISTRY ; FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEATGENERATING MEANS, IN GENERAL ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; METALLURGY ; RANGES ; TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE ; VENTILATING ; WEAPONS</subject><creationdate>2019</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190912&DB=EPODOC&CC=JP&NR=2019152411A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190912&DB=EPODOC&CC=JP&NR=2019152411A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HORII SHIGEKI</creatorcontrib><title>HEATING METHOD OF ULTRAPURE WATER</title><description>To provide a heating method of ultrapure water which can reduce heat source cost of a heat exchanger for heating ultrapure water delivered to a use point to produce warm ultrapure water.SOLUTION: Secondary pure water from a sub system 4 is heated in a heat exchanger 6, a heat exchanger 10 and a heat exchanger 12, and is delivered to a use point. A heat source of the heat exchanger 6 is return warm ultrapure water from the use point. In the heat exchanger 10, medium water heated in a heater 40 is circulated. According to an ultrapure water use amount at the use point, a pump 46 for medium water circulation is inverter-controlled, and a bypass flow rate is controlled by a three-way valve 43.SELECTED DRAWING: Figure 1
【課題】ユースポイントに送水される超純水を加温して温超純水とするための熱交換器の熱源コストを低減することができる超純水加熱方法を提供する。【解決手段】サブシステム４からの二次純水を熱交換器６、熱交換器１０及び熱交換器１２で加熱してユースポイントへ送る。熱交換器６の熱源はユースポイントからの戻り温超純水である。熱交換器１０には、加熱器４０で加熱された媒体水が循環通水される。ユースポイントの超純水使用量に応じて、媒体水循環用のポンプ４６をインバータ制御すると共に、バイパス流量を三方弁４３によって制御する。【選択図】図１</description><subject>BLASTING</subject><subject>CHEMISTRY</subject><subject>FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEATGENERATING MEANS, IN GENERAL</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>METALLURGY</subject><subject>RANGES</subject><subject>TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE</subject><subject>VENTILATING</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2019</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFD0cHUM8fRzV_B1DfHwd1Hwd1MI9QkJcgwIDXJVCHcMcQ3iYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBoaWhqZGJoaGjsZEKQIAVZ4ijQ</recordid><startdate>20190912</startdate><enddate>20190912</enddate><creator>HORII SHIGEKI</creator><scope>EVB</scope></search><sort><creationdate>20190912</creationdate><title>HEATING METHOD OF ULTRAPURE WATER</title><author>HORII SHIGEKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2019152411A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2019</creationdate><topic>BLASTING</topic><topic>CHEMISTRY</topic><topic>FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEATGENERATING MEANS, IN GENERAL</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>METALLURGY</topic><topic>RANGES</topic><topic>TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE</topic><topic>VENTILATING</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>HORII SHIGEKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HORII SHIGEKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>HEATING METHOD OF ULTRAPURE WATER</title><date>2019-09-12</date><risdate>2019</risdate><abstract>To provide a heating method of ultrapure water which can reduce heat source cost of a heat exchanger for heating ultrapure water delivered to a use point to produce warm ultrapure water.SOLUTION: Secondary pure water from a sub system 4 is heated in a heat exchanger 6, a heat exchanger 10 and a heat exchanger 12, and is delivered to a use point. A heat source of the heat exchanger 6 is return warm ultrapure water from the use point. In the heat exchanger 10, medium water heated in a heater 40 is circulated. According to an ultrapure water use amount at the use point, a pump 46 for medium water circulation is inverter-controlled, and a bypass flow rate is controlled by a three-way valve 43.SELECTED DRAWING: Figure 1
【課題】ユースポイントに送水される超純水を加温して温超純水とするための熱交換器の熱源コストを低減することができる超純水加熱方法を提供する。【解決手段】サブシステム４からの二次純水を熱交換器６、熱交換器１０及び熱交換器１２で加熱してユースポイントへ送る。熱交換器６の熱源はユースポイントからの戻り温超純水である。熱交換器１０には、加熱器４０で加熱された媒体水が循環通水される。ユースポイントの超純水使用量に応じて、媒体水循環用のポンプ４６をインバータ制御すると共に、バイパス流量を三方弁４３によって制御する。【選択図】図１</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BLASTING CHEMISTRY FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEATGENERATING MEANS, IN GENERAL HEATING LIGHTING MECHANICAL ENGINEERING METALLURGY RANGES TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE VENTILATING WEAPONS |
| title | HEATING METHOD OF ULTRAPURE WATER |
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