MEMS CONTROL CIRCUIT, AND PROJECTOR INCLUDING THE SAME

MEMS CONTROL CIRCUIT, AND PROJECTOR INCLUDING THE SAME

To provide an MEMS control circuit capable of making a drive frequency of an MEMS device accurately follow a resonance frequency.SOLUTION: A MEMS control circuit includes: an average value acquisition part for obtaining an amplitude average value per unit time on the basis of a monitor signal indica...

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Hauptverfasser: KATO TOMOKI, UJIIE YUSUKE, FURUYA AKIKO, KAWAZOE NOBUAKI
Format: Patent
Sprache:eng ; jpn
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OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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creator KATO TOMOKI
UJIIE YUSUKE
FURUYA AKIKO
KAWAZOE NOBUAKI
description To provide an MEMS control circuit capable of making a drive frequency of an MEMS device accurately follow a resonance frequency.SOLUTION: A MEMS control circuit includes: an average value acquisition part for obtaining an amplitude average value per unit time on the basis of a monitor signal indicating an amplitude of an MEMS device in a fast axis direction; a comparison part for comparing the amplitude average value with a reference value; and a drive frequency adjustment part for updating a drive frequency of the MEMS device when the same comparison results continue a predetermined number of times.SELECTED DRAWING: Figure 4 【課題】ＭＥＭＳデバイスの駆動周波数を精度良く共振周波数に追従させることのできるＭＥＭＳ制御回路を提供する。【解決手段】ＭＥＭＳ制御回路は、ＭＥＭＳデバイスの高速軸方向の振幅を表わすモニタ信号に基づいて単位時間あたりの振幅平均値を求める平均値取得部と、前記振幅平均値を基準値と比較する比較部と、同一の比較結果が所定回数連続する場合に前記ＭＥＭＳデバイスの駆動周波数を更新する駆動周波数調整部と、を有する。【選択図】図４
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OPTICS
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title MEMS CONTROL CIRCUIT, AND PROJECTOR INCLUDING THE SAME
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