VACUUM PUMP

To provide a vacuum pump capable of performing an operation of less abrasion of a component and less generation of noise with lower vibration behavior and higher operation safety.SOLUTION: A vacuum pump (10), in particular, a turbo molecular pump has a stator for at least one pump stage, and a rotor...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	STOLL TOBIAS, JUNG JUERGEN DR
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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