SUBSTRATE HOUSING CONTAINER, CONTROL DEVICE AND ABNORMALITY DETECTION METHOD

To detect a contamination state in a substrate housing container.SOLUTION: A substrate housing container for housing a substrate has a monitor that can detect a contamination state, in the substrate housing container, and detects the contamination state in the substrate housing container.SELECTED DR...

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1. Verfasser:	NAGAIKE HIROSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	To detect a contamination state in a substrate housing container.SOLUTION: A substrate housing container for housing a substrate has a monitor that can detect a contamination state, in the substrate housing container, and detects the contamination state in the substrate housing container.SELECTED DRAWING: Figure 3 【課題】基板収納容器の内部の汚染状態を検出することを目的とする。【解決手段】基板を収納する基板収納容器であって、前記基板収納容器の内部に、汚染状態を検出可能なモニタを有し、前記基板収納容器の内部の汚染状態を検出する、基板収納容器が提供される。【選択図】図３