LIQUID DROPLET MEASUREMENT METHOD AND LIQUID DROPLET MEASURING APPARATUS
PROBLEM TO BE SOLVED: To provide a liquid droplet measuring apparatus with which it is possible to improve luminance contrast when, while imaging a liquid droplet on a sample substrate that is set on a measurement stage and acquiring luminance information, sufficient luminance contrast cannot be obt...
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| creator | SUEMASU SATOSHI MASUNAGA KEIJIRO |
| description | PROBLEM TO BE SOLVED: To provide a liquid droplet measuring apparatus with which it is possible to improve luminance contrast when, while imaging a liquid droplet on a sample substrate that is set on a measurement stage and acquiring luminance information, sufficient luminance contrast cannot be obtained with only the amount of light reflection from the liquid droplet being measured.SOLUTION: The liquid droplet measuring device is constituted in such a way that the thickness of a sample substrate 19 is larger than the focal distance 46 of a liquid droplet 30. Light 43 reflected on the reverse side of the sample substrate 19 can be considered to be parallel light in the vicinity of liquid droplet surface and luminance distribution consists only of reflected light from the liquid droplet surface that changes with the inclination of the liquid droplet surface, so that luminance represented by the sum of reflected light at the liquid droplet 30 and the light 43 reflected at the reverse side of the sample substrate 19 is imaged by an imaging unit, and a measurement control unit obtains the cubic volume or surface shape of the liquid droplet 30 on the basis of this luminance information.SELECTED DRAWING: Figure 8
【課題】測定ステージにセットしたサンプル基板上の液滴を撮像して輝度情報を取得する場合に、測定対象の液滴からの光反射量だけでは十分な輝度コントラストが得られない場合に、輝度コントラストを向上させることができる液滴測定装置を提供する。【解決手段】液滴測定装置は、サンプル基板１９の厚みが、液滴３０の焦点距離４６よりも大きく構成されている。サンプル基板１９の裏面で反射した光４３は液滴表面付近では平行光とみなすことができ、液滴表面の傾斜に応じて変化する液滴表面からの反射光のみの輝度分布となり、液滴３０での反射光とサンプル基板１９の裏面で反射した光４３の和で表される輝度を撮像部によって撮影し、この輝度情報に基づいて測定制御部が液滴３０の体積あるいは表面形状を求める。【選択図】図８ |
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【課題】測定ステージにセットしたサンプル基板上の液滴を撮像して輝度情報を取得する場合に、測定対象の液滴からの光反射量だけでは十分な輝度コントラストが得られない場合に、輝度コントラストを向上させることができる液滴測定装置を提供する。【解決手段】液滴測定装置は、サンプル基板１９の厚みが、液滴３０の焦点距離４６よりも大きく構成されている。サンプル基板１９の裏面で反射した光４３は液滴表面付近では平行光とみなすことができ、液滴表面の傾斜に応じて変化する液滴表面からの反射光のみの輝度分布となり、液滴３０での反射光とサンプル基板１９の裏面で反射した光４３の和で表される輝度を撮像部によって撮影し、この輝度情報に基づいて測定制御部が液滴３０の体積あるいは表面形状を求める。【選択図】図８</description><language>eng ; jpn</language><subject>CORRECTION OF TYPOGRAPHICAL ERRORS ; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME ; LINING MACHINES ; MEASURING ; MEASURING ANGLES ; MEASURING AREAS ; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ; PERFORMING OPERATIONS ; PHYSICS ; PRINTING ; SELECTIVE PRINTING MECHANISMS ; STAMPS ; TESTING ; TRANSPORTING ; TYPEWRITERS</subject><creationdate>2018</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20181115&DB=EPODOC&CC=JP&NR=2018179536A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20181115&DB=EPODOC&CC=JP&NR=2018179536A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SUEMASU SATOSHI</creatorcontrib><creatorcontrib>MASUNAGA KEIJIRO</creatorcontrib><title>LIQUID DROPLET MEASUREMENT METHOD AND LIQUID DROPLET MEASURING APPARATUS</title><description>PROBLEM TO BE SOLVED: To provide a liquid droplet measuring apparatus with which it is possible to improve luminance contrast when, while imaging a liquid droplet on a sample substrate that is set on a measurement stage and acquiring luminance information, sufficient luminance contrast cannot be obtained with only the amount of light reflection from the liquid droplet being measured.SOLUTION: The liquid droplet measuring device is constituted in such a way that the thickness of a sample substrate 19 is larger than the focal distance 46 of a liquid droplet 30. Light 43 reflected on the reverse side of the sample substrate 19 can be considered to be parallel light in the vicinity of liquid droplet surface and luminance distribution consists only of reflected light from the liquid droplet surface that changes with the inclination of the liquid droplet surface, so that luminance represented by the sum of reflected light at the liquid droplet 30 and the light 43 reflected at the reverse side of the sample substrate 19 is imaged by an imaging unit, and a measurement control unit obtains the cubic volume or surface shape of the liquid droplet 30 on the basis of this luminance information.SELECTED DRAWING: Figure 8
【課題】測定ステージにセットしたサンプル基板上の液滴を撮像して輝度情報を取得する場合に、測定対象の液滴からの光反射量だけでは十分な輝度コントラストが得られない場合に、輝度コントラストを向上させることができる液滴測定装置を提供する。【解決手段】液滴測定装置は、サンプル基板１９の厚みが、液滴３０の焦点距離４６よりも大きく構成されている。サンプル基板１９の裏面で反射した光４３は液滴表面付近では平行光とみなすことができ、液滴表面の傾斜に応じて変化する液滴表面からの反射光のみの輝度分布となり、液滴３０での反射光とサンプル基板１９の裏面で反射した光４３の和で表される輝度を撮像部によって撮影し、この輝度情報に基づいて測定制御部が液滴３０の体積あるいは表面形状を求める。【選択図】図８</description><subject>CORRECTION OF TYPOGRAPHICAL ERRORS</subject><subject>i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME</subject><subject>LINING MACHINES</subject><subject>MEASURING</subject><subject>MEASURING ANGLES</subject><subject>MEASURING AREAS</subject><subject>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</subject><subject>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>PRINTING</subject><subject>SELECTIVE PRINTING MECHANISMS</subject><subject>STAMPS</subject><subject>TESTING</subject><subject>TRANSPORTING</subject><subject>TYPEWRITERS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2018</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPDw8QwM9XRRcAnyD_BxDVHwdXUMDg1y9XX1A7FDPPxdFBz9XBSwqvL0c1dwDAhwDHIMCQ3mYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBoYWhuaWpsZmjsZEKQIAh0gtsQ</recordid><startdate>20181115</startdate><enddate>20181115</enddate><creator>SUEMASU SATOSHI</creator><creator>MASUNAGA KEIJIRO</creator><scope>EVB</scope></search><sort><creationdate>20181115</creationdate><title>LIQUID DROPLET MEASUREMENT METHOD AND LIQUID DROPLET MEASURING APPARATUS</title><author>SUEMASU SATOSHI ; MASUNAGA KEIJIRO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2018179536A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2018</creationdate><topic>CORRECTION OF TYPOGRAPHICAL ERRORS</topic><topic>i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME</topic><topic>LINING MACHINES</topic><topic>MEASURING</topic><topic>MEASURING ANGLES</topic><topic>MEASURING AREAS</topic><topic>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</topic><topic>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>PRINTING</topic><topic>SELECTIVE PRINTING MECHANISMS</topic><topic>STAMPS</topic><topic>TESTING</topic><topic>TRANSPORTING</topic><topic>TYPEWRITERS</topic><toplevel>online_resources</toplevel><creatorcontrib>SUEMASU SATOSHI</creatorcontrib><creatorcontrib>MASUNAGA KEIJIRO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SUEMASU SATOSHI</au><au>MASUNAGA KEIJIRO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>LIQUID DROPLET MEASUREMENT METHOD AND LIQUID DROPLET MEASURING APPARATUS</title><date>2018-11-15</date><risdate>2018</risdate><abstract>PROBLEM TO BE SOLVED: To provide a liquid droplet measuring apparatus with which it is possible to improve luminance contrast when, while imaging a liquid droplet on a sample substrate that is set on a measurement stage and acquiring luminance information, sufficient luminance contrast cannot be obtained with only the amount of light reflection from the liquid droplet being measured.SOLUTION: The liquid droplet measuring device is constituted in such a way that the thickness of a sample substrate 19 is larger than the focal distance 46 of a liquid droplet 30. Light 43 reflected on the reverse side of the sample substrate 19 can be considered to be parallel light in the vicinity of liquid droplet surface and luminance distribution consists only of reflected light from the liquid droplet surface that changes with the inclination of the liquid droplet surface, so that luminance represented by the sum of reflected light at the liquid droplet 30 and the light 43 reflected at the reverse side of the sample substrate 19 is imaged by an imaging unit, and a measurement control unit obtains the cubic volume or surface shape of the liquid droplet 30 on the basis of this luminance information.SELECTED DRAWING: Figure 8
【課題】測定ステージにセットしたサンプル基板上の液滴を撮像して輝度情報を取得する場合に、測定対象の液滴からの光反射量だけでは十分な輝度コントラストが得られない場合に、輝度コントラストを向上させることができる液滴測定装置を提供する。【解決手段】液滴測定装置は、サンプル基板１９の厚みが、液滴３０の焦点距離４６よりも大きく構成されている。サンプル基板１９の裏面で反射した光４３は液滴表面付近では平行光とみなすことができ、液滴表面の傾斜に応じて変化する液滴表面からの反射光のみの輝度分布となり、液滴３０での反射光とサンプル基板１９の裏面で反射した光４３の和で表される輝度を撮像部によって撮影し、この輝度情報に基づいて測定制御部が液滴３０の体積あるいは表面形状を求める。【選択図】図８</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CORRECTION OF TYPOGRAPHICAL ERRORS i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PERFORMING OPERATIONS PHYSICS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TESTING TRANSPORTING TYPEWRITERS |
| title | LIQUID DROPLET MEASUREMENT METHOD AND LIQUID DROPLET MEASURING APPARATUS |
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