CLEANING DEVICE, CLEANING METHOD, AND MANUFACTURING METHOD OF MEMBER

PROBLEM TO BE SOLVED: To provide a cleaning device, a cleaning method, and a manufacturing method of a member which can remove and recover a surface treatment chemical adhering to a surface of the member with a simple structure in cleaning the member to remove the chemical adhering during surface tr...

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Bibliographische Detailangaben
1. Verfasser: YANAGAWA KEITA
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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