PRODUCTION METHOD OF SPHERICAL ALUMINUM NITRIDE PARTICLE, AND PRODUCTION APPARATUS OF SPHERICAL ALUMINUM NITRIDE PARTICLE
PROBLEM TO BE SOLVED: To provide a production method of spherical aluminum nitride particles and a production apparatus of spherical aluminum nitride particles, with which spherical aluminum nitride particles with a desired degree of nitriding can be obtained.SOLUTION: In a production apparatus 1 of...
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Format: | Patent |
Sprache: | eng ; jpn |
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