PRODUCTION METHOD OF SPHERICAL ALUMINUM NITRIDE PARTICLE, AND PRODUCTION APPARATUS OF SPHERICAL ALUMINUM NITRIDE PARTICLE

PROBLEM TO BE SOLVED: To provide a production method of spherical aluminum nitride particles and a production apparatus of spherical aluminum nitride particles, with which spherical aluminum nitride particles with a desired degree of nitriding can be obtained.SOLUTION: In a production apparatus 1 of...

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Bibliographische Detailangaben
Hauptverfasser: SUGIBASHI ATSUSHI, SATO YUTAKA, SAWANO KIYOSHI
Format: Patent
Sprache:eng ; jpn
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