PRODUCTION METHOD OF SPHERICAL ALUMINUM NITRIDE PARTICLE, AND PRODUCTION APPARATUS OF SPHERICAL ALUMINUM NITRIDE PARTICLE

PROBLEM TO BE SOLVED: To provide a production method of spherical aluminum nitride particles and a production apparatus of spherical aluminum nitride particles, with which spherical aluminum nitride particles with a desired degree of nitriding can be obtained.SOLUTION: In a production apparatus 1 of spherical aluminum nitride particles, because microwave irradiation can be completed at predetermined completion timing based on concentration of carbon monoxide gas generated in accordance with a degree of nitriding of the spherical alumina particles treated in an applicator 2, the degree of nitriding of the spherical alumina particles can be controlled irrespective of heating temperature, consequently variation of the degree of nitriding is suppressed and the spherical aluminum nitride particles with a desired degree of nitriding can be obtained.SELECTED DRAWING: Figure 1 【課題】所望の窒化度合いの球状窒化アルミニウム粒子を得ることができる球状窒化アルミニウム粒子の製造方法及び球状窒化アルミニウム粒子製造装置を提供する。【解決手段】球状窒化アルミニウム粒子製造装置１では、アプリケーター２内で処理する球状アルミナ粒子の窒化度に応じて発生する一酸化炭素ガス濃度に基づき予め定まる終了タイミングでマイクロ波照射を終了できるので、加熱温度によらず球状アルミナ粒子の窒化度を制御でき、かくして窒化度のばらつきが抑えられ、所望の窒化度合いの球状窒化アルミニウム粒子を得ることができる。【選択図】図１