PROBE GUIDE PLATE, PROBE DEVICE, AND MANUFACTURING METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a probe guide plate of new construction in which two guide plates are stacked one on top of another with high reliability at low cost.SOLUTION: The probe guide plate includes: a first silicon substrate 11; a first recess C1 formed in the top face of the first silicon substrate 11; a first through-hole TH1 formed on the first silicon substrate 11 at the bottom of the first recess C1; a second silicon substrate 12 directly joined to the top of the first silicon substrate 11; a second recess C2 formed in the underside of the second silicone substrate 12 facing the first recess C1; and a second through-hole TH2 formed in the second silicon substrate 12 at the bottom of the second recess C2 and arranged in correspondence to the first through-hole TH1. A notch part N is formed at the inner wall upper end of the first through-hole TH1 of the first silicon substrate 11.SELECTED DRAWING: Figure 11 【課題】２枚のガイド板が低コストで信頼性よく積層される新規な構造のプローブガイド板を提供する。【解決手段】第１シリコン基板１１と、第１シリコン基板１１の上面に形成された第１凹部Ｃ１と、第１凹部Ｃ１の底の第１シリコン基板１１に形成された第１貫通孔ＴＨ１と、第１シリコン基板１１の上に直接接合された第２シリコン基板１２と、第２シリコン基板１２の下面に、第１凹部Ｃ１に対向して形成された第２凹部Ｃ２と、第２凹部Ｃ２の底の第２シリコン基板１２に形成され、第１貫通孔ＴＨ１に対応して配置された第２貫通孔ＴＨ２とを含み、第１シリコン基板１１の第１貫通孔ＴＨ１の内壁の上端部にノッチ部Ｎが形成されている。【選択図】図１１