THREE-DIMENSIONAL COORDINATE MEASURING INSTRUMENT
PROBLEM TO BE SOLVED: To provide a high accuracy three-dimensional coordinate measuring instrument capable of manufacturing with a simple constitution and at a low manufacturing cost.SOLUTION: A three-dimensional coordinate measuring instrument measures a measured object on a base 11 by using a meas...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a high accuracy three-dimensional coordinate measuring instrument capable of manufacturing with a simple constitution and at a low manufacturing cost.SOLUTION: A three-dimensional coordinate measuring instrument measures a measured object on a base 11 by using a measurement probe 51 that is moved by movement mechanisms 31, 60, 70, and 80 arranged across the base 11. The movement mechanisms include on one side the linear guide 70 having a driving unit movable with respect to the base, and on the other side the air bearing mechanism 80 that is moved parallel with the linear guide.SELECTED DRAWING: Figure 5
【課題】簡単な構成で、低い製造コストで製造できる高精度の三次元座標測定機を提供する。【解決手段】ベース11を跨いで配置される移動機構31,60,70,80により移動する測定プローブ51を用いて、ベース11上の被測定物を測定する三次元座標測定機において、移動機構は、片側に、ベースに対して移動可能な駆動部をもつリニアガイド70と、もう一方の片側に、リニアガイドと平行に移動するエアーベアリング機構80と、を有する三次元座標測定装置。【選択図】図5 |
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