PATTERN INSPECTION DEVICE

PROBLEM TO BE SOLVED: To provide an inspection device that minimizes a rotation deviation of a sample arising from yawing of a stage upon driving, and can highly accurately and quickly measure an amount of rotation deviation.SOLUTION: An inspection device comprises: a Zθ stage 70 (a first stage) tha...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NUKADA HIDEKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!