PENETRATION TYPE FURNACE AND DIE BONDER WITH PENETRATION TYPE FURNACE

PROBLEM TO BE SOLVED: To provide a penetration type furnace which prevents outside air from flowing into a channel together with a protective gas, and a die bonder comprising the penetration type furnace.SOLUTION: The penetration type furnace comprises a furnace body 2 and a cover 6 enclosing a channel in which a substrate can be conveyed and to which an actuation gas can be supplied. The cover 6 includes at least one processing opening. A boundary surface between components of the penetration type furnace which are connected to be attached to and detached from each other are formed while including mating surfaces 11 and 12 which are opposite to each other. At least several boundary surfaces include grooves 15 that can be evacuated at the time of operation. Air intruded into an inevitable gap between the mating surfaces 11 and 12 is extracted by being sucked via the grooves 15 and does not reach an internal space of the furnace.SELECTED DRAWING: Figure 2 【課題】外気が保護ガスと共にチャネルに流入するのを防ぐ貫通型炉及び貫通型炉を有するダイボンダを提供する。【解決手段】本発明は、基板が搬送されることができ、作動ガスが供給されることができるチャネルを囲む炉体２及びカバー６を有する貫通型炉であって、カバー６は、少なくとも１つの加工開口部を含む。互いに着脱可能に接続される貫通型炉の個々の部品間の境界面は、互いに対向する合わせ面１１、１２を有して形成される。少なくとも幾つかの境界面は、運転時に減圧にされることができる溝１５を含む。合わせ面１１、１２間の不可避的な間隙に侵入する空気は、溝１５を介して吸引することによって抽気され、炉の内部空間には到達しない。【選択図】図２