MANUFACTURING METHOD OF SILICON SINGLE CRYSTAL

PROBLEM TO BE SOLVED: To provide a manufacturing method of a silicon single crystal capable of efficiently suppressing generation of pinholes in a single crystal.SOLUTION: A manufacturing method of a silicon single crystal in which a silicon single crystal is drawn up from a silicon melt 3 in a quar...

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1. Verfasser: KIN DAIKI
Format: Patent
Sprache:eng ; jpn
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