DISPLACEMENT SENSOR AND DISPLACEMENT MEASUREMENT DEVICE

PROBLEM TO BE SOLVED: To measure the displacement of the surface of a measurement object with high accuracy irrespective of the direction of a streak shape when there are minute streak shapes on the surface of the measurement object.SOLUTION: A displacement sensor according to the present invention comprises a light-projection optical system for radiating a plurality of condensed irradiation light including a first irradiation light and a second irradiation light radiated onto the top surface of a workpiece 6 from mutually different directions, and a light-receiving optical system for condensing the reflected light of the plurality of irradiation light that are reflected at irradiated surfaces onto the light receiving surface of a two-dimensional image sensor 8, a first plane formed by the optical axis of the first irradiation light and the optical axis of the light-receiving optical system and a second plane formed by the optical axis of the second irradiation light and the optical axis of the light-receiving optical system intersecting at right angles, the displacement sensor measuring the displacement of the top surface of the workpiece 6 by measuring the displacement of the position of the condensed light of reflected light on the light receiving surface.SELECTED DRAWING: Figure 1 【課題】測定対象物の表面に微細な筋状の形状が存在する場合に、筋状の形状の向きに関わらず高精度に測定対象物の表面の変位を測定する。【解決手段】互いに異なる方向からワーク６の上面に照射される第１の照射光と第２の照射光とを含む集光された複数の照射光を照射する投光光学系と、複数の照射光が被照射面で反射された反射光を２次元イメージセンサ８の受光面に集光する受光光学系とを備え、第１の照射光の光軸と受光光学系の光軸とがなす第１の平面と、第２の照射光の光軸と受光光学系の光軸とがなす第２の平面とが直角に交わり、受光面における反射光の集光位置の変位を計測することでワーク６の上面の変位を測定する。【選択図】図１