DRY TYPE FINGERPRINT CLEANING DEVICE

PROBLEM TO BE SOLVED: To provide a dry type fingerprint cleaning device capable of removing a pollutant including a fingerprint formed on a surface of a cleaning object substrate, by combinedly using physical cleaning of using an ultrasonic wave and a cleaning towel and cleaning of using plasma.SOLU...

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1. Verfasser:	CHUN BYUNG JOON
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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creator	CHUN BYUNG JOON
description	PROBLEM TO BE SOLVED: To provide a dry type fingerprint cleaning device capable of removing a pollutant including a fingerprint formed on a surface of a cleaning object substrate, by combinedly using physical cleaning of using an ultrasonic wave and a cleaning towel and cleaning of using plasma.SOLUTION: A dry type fingerprint cleaning device 100 comprises a substrate carrying part 110 for carrying a cleaning object substrate 1 in one direction, an ultrasonic cleaning part 120 arranged on the upper side of an inlet of the substrate carrying part and cleaning an upper surface of the cleaning object substrate carried by the substrate carrying part by using an ultrasonic wave, a cleaning liquid cleaning part 130 adjacently provided in the ultrasonic cleaning part and rubbing and cleaning an upper surface of the cleaning object substrate by a cleaning towel 136 of applying a cleaning liquid and a plasma cleaning part 140 adjacently provided in the cleaning liquid cleaning part and cleaning by injecting plasma into the upper surface of the cleaning object substrate.SELECTED DRAWING: Figure 1 【課題】超音波及び洗浄タオルを用いた物理的な洗浄とプラズマを用いた洗浄を併用して、被洗浄基板の表面に形成されている指紋をはじめとする汚染物質を除去することのできる乾式指紋洗浄装置を提供すること。【解決手段】被洗浄基板１を一方の方向に搬送する基板搬送部１１０と、前記基板搬送部の入口の上側に配設され、前記基板搬送部により搬送される被洗浄基板の上面を超音波を用いて洗浄する超音波洗浄部１２０と、前記超音波洗浄部に隣設され、前記被洗浄基板の上面を洗浄液が塗布されている洗浄タオル１３６でこすって洗浄する洗浄液洗浄部１３０と、前記洗浄液洗浄部に隣設され、前記被洗浄基板の上面にプラズマを噴射して洗浄するプラズマ洗浄部１４０と、を備えることを特徴とする乾式指紋洗浄装置１００。【選択図】図１
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jpn</language><creationdate>2016</creationdate><topic>CLEANING</topic><topic>CLEANING IN GENERAL</topic><topic>PERFORMING OPERATIONS</topic><topic>PREVENTION OF FOULING IN GENERAL</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>CHUN BYUNG JOON</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHUN BYUNG JOON</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>DRY TYPE FINGERPRINT CLEANING DEVICE</title><date>2016-05-26</date><risdate>2016</risdate><abstract>PROBLEM TO BE SOLVED: To provide a dry type fingerprint cleaning device capable of removing a pollutant including a fingerprint formed on a surface of a cleaning object substrate, by combinedly using physical cleaning of using an ultrasonic wave and a cleaning towel and cleaning of using plasma.SOLUTION: A dry type fingerprint cleaning device 100 comprises a substrate carrying part 110 for carrying a cleaning object substrate 1 in one direction, an ultrasonic cleaning part 120 arranged on the upper side of an inlet of the substrate carrying part and cleaning an upper surface of the cleaning object substrate carried by the substrate carrying part by using an ultrasonic wave, a cleaning liquid cleaning part 130 adjacently provided in the ultrasonic cleaning part and rubbing and cleaning an upper surface of the cleaning object substrate by a cleaning towel 136 of applying a cleaning liquid and a plasma cleaning part 140 adjacently provided in the cleaning liquid cleaning part and cleaning by injecting plasma into the upper surface of the cleaning object substrate.SELECTED DRAWING: Figure 1 【課題】超音波及び洗浄タオルを用いた物理的な洗浄とプラズマを用いた洗浄を併用して、被洗浄基板の表面に形成されている指紋をはじめとする汚染物質を除去することのできる乾式指紋洗浄装置を提供すること。【解決手段】被洗浄基板１を一方の方向に搬送する基板搬送部１１０と、前記基板搬送部の入口の上側に配設され、前記基板搬送部により搬送される被洗浄基板の上面を超音波を用いて洗浄する超音波洗浄部１２０と、前記超音波洗浄部に隣設され、前記被洗浄基板の上面を洗浄液が塗布されている洗浄タオル１３６でこすって洗浄する洗浄液洗浄部１３０と、前記洗浄液洗浄部に隣設され、前記被洗浄基板の上面にプラズマを噴射して洗浄するプラズマ洗浄部１４０と、を備えることを特徴とする乾式指紋洗浄装置１００。【選択図】図１</abstract><oa>free_for_read</oa></addata></record>
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subjects	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
title	DRY TYPE FINGERPRINT CLEANING DEVICE
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