DEBRIS TRAP DEVICE AND EXTREME-ULTRAVIOLET LIGHT SOURCE DEVICE
PROBLEM TO BE SOLVED: To provide a debris trap device capable of stably catching debris by preventing trouble of a rotary wheel trap, the debris trap device including the rotary wheel trap and a cover member, and an extreme-ultraviolet light source device with the same.SOLUTION: A debris trap 13 inc...
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| creator | YABUTA YASUNOBU |
| description | PROBLEM TO BE SOLVED: To provide a debris trap device capable of stably catching debris by preventing trouble of a rotary wheel trap, the debris trap device including the rotary wheel trap and a cover member, and an extreme-ultraviolet light source device with the same.SOLUTION: A debris trap 13 includes: a wheel trap 30 which includes a plurality of wheels 31 disposed in the vicinity of a plasma that emits extreme-ultraviolet light, passes the extreme-ultraviolet light and catches debris generated from the plasma; a cover member 35 which surrounds an outer peripheral part of the wheel trap 30 and collects debris; and a debris discharge pipe 37 for discharging debris collected by the cover member 35 to the outside of the cover member 35. Further, the debris trap 13 includes a clogging detection part for detecting that the debris discharge pipe 37 is clogged by debris.SELECTED DRAWING: Figure 2
【課題】回転式ホイルトラップとカバー部材とを備えるデブリトラップ装置において、回転式ホイルトラップの不具合を抑制して安定してデブリを捕捉することができるデブリトラップ装置、及びそれを備えた極端紫外光光源装置を提供する。【解決手段】デブリトラップ１３は、極端紫外光を放出するプラズマの近傍に配置された複数のホイル３１を有し、極端紫外光を通過しプラズマから発生するデブリを捕捉する回転可能なホイルトラップ３０と、ホイルトラップ３０の外周部を包囲してデブリを捕集するカバー部材３５と、カバー部材３５で捕集したデブリをカバー部材３５の外部へ排出するためのデブリ排出管３７と、を備える。さらに、デブリトラップ１３は、デブリ排出管３７がデブリによって閉塞することを検出する閉塞検出部を備える。【選択図】 図２ |
| format | Patent |
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【課題】回転式ホイルトラップとカバー部材とを備えるデブリトラップ装置において、回転式ホイルトラップの不具合を抑制して安定してデブリを捕捉することができるデブリトラップ装置、及びそれを備えた極端紫外光光源装置を提供する。【解決手段】デブリトラップ１３は、極端紫外光を放出するプラズマの近傍に配置された複数のホイル３１を有し、極端紫外光を通過しプラズマから発生するデブリを捕捉する回転可能なホイルトラップ３０と、ホイルトラップ３０の外周部を包囲してデブリを捕集するカバー部材３５と、カバー部材３５で捕集したデブリをカバー部材３５の外部へ排出するためのデブリ排出管３７と、を備える。さらに、デブリトラップ１３は、デブリ排出管３７がデブリによって閉塞することを検出する閉塞検出部を備える。【選択図】 図２</description><language>eng ; jpn</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES ; X-RAY TECHNIQUE</subject><creationdate>2016</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160201&DB=EPODOC&CC=JP&NR=2016018701A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25562,76317</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160201&DB=EPODOC&CC=JP&NR=2016018701A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YABUTA YASUNOBU</creatorcontrib><title>DEBRIS TRAP DEVICE AND EXTREME-ULTRAVIOLET LIGHT SOURCE DEVICE</title><description>PROBLEM TO BE SOLVED: To provide a debris trap device capable of stably catching debris by preventing trouble of a rotary wheel trap, the debris trap device including the rotary wheel trap and a cover member, and an extreme-ultraviolet light source device with the same.SOLUTION: A debris trap 13 includes: a wheel trap 30 which includes a plurality of wheels 31 disposed in the vicinity of a plasma that emits extreme-ultraviolet light, passes the extreme-ultraviolet light and catches debris generated from the plasma; a cover member 35 which surrounds an outer peripheral part of the wheel trap 30 and collects debris; and a debris discharge pipe 37 for discharging debris collected by the cover member 35 to the outside of the cover member 35. Further, the debris trap 13 includes a clogging detection part for detecting that the debris discharge pipe 37 is clogged by debris.SELECTED DRAWING: Figure 2
【課題】回転式ホイルトラップとカバー部材とを備えるデブリトラップ装置において、回転式ホイルトラップの不具合を抑制して安定してデブリを捕捉することができるデブリトラップ装置、及びそれを備えた極端紫外光光源装置を提供する。【解決手段】デブリトラップ１３は、極端紫外光を放出するプラズマの近傍に配置された複数のホイル３１を有し、極端紫外光を通過しプラズマから発生するデブリを捕捉する回転可能なホイルトラップ３０と、ホイルトラップ３０の外周部を包囲してデブリを捕集するカバー部材３５と、カバー部材３５で捕集したデブリをカバー部材３５の外部へ排出するためのデブリ排出管３７と、を備える。さらに、デブリトラップ１３は、デブリ排出管３７がデブリによって閉塞することを検出する閉塞検出部を備える。【選択図】 図２</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>X-RAY TECHNIQUE</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2016</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLBzcXUK8gxWCAlyDFBwcQ3zdHZVcPRzUXCNCAly9XXVDfUByoR5-vu4hij4eLp7hCgE-4cGARVB1PIwsKYl5hSn8kJpbgYlN9cQZw_d1IL8-NTigsTk1LzUknivACMDQzMDQwtzA0NHY6IUAQCkZCp7</recordid><startdate>20160201</startdate><enddate>20160201</enddate><creator>YABUTA YASUNOBU</creator><scope>EVB</scope></search><sort><creationdate>20160201</creationdate><title>DEBRIS TRAP DEVICE AND EXTREME-ULTRAVIOLET LIGHT SOURCE DEVICE</title><author>YABUTA YASUNOBU</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2016018701A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2016</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>X-RAY TECHNIQUE</topic><toplevel>online_resources</toplevel><creatorcontrib>YABUTA YASUNOBU</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YABUTA YASUNOBU</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>DEBRIS TRAP DEVICE AND EXTREME-ULTRAVIOLET LIGHT SOURCE DEVICE</title><date>2016-02-01</date><risdate>2016</risdate><abstract>PROBLEM TO BE SOLVED: To provide a debris trap device capable of stably catching debris by preventing trouble of a rotary wheel trap, the debris trap device including the rotary wheel trap and a cover member, and an extreme-ultraviolet light source device with the same.SOLUTION: A debris trap 13 includes: a wheel trap 30 which includes a plurality of wheels 31 disposed in the vicinity of a plasma that emits extreme-ultraviolet light, passes the extreme-ultraviolet light and catches debris generated from the plasma; a cover member 35 which surrounds an outer peripheral part of the wheel trap 30 and collects debris; and a debris discharge pipe 37 for discharging debris collected by the cover member 35 to the outside of the cover member 35. Further, the debris trap 13 includes a clogging detection part for detecting that the debris discharge pipe 37 is clogged by debris.SELECTED DRAWING: Figure 2
【課題】回転式ホイルトラップとカバー部材とを備えるデブリトラップ装置において、回転式ホイルトラップの不具合を抑制して安定してデブリを捕捉することができるデブリトラップ装置、及びそれを備えた極端紫外光光源装置を提供する。【解決手段】デブリトラップ１３は、極端紫外光を放出するプラズマの近傍に配置された複数のホイル３１を有し、極端紫外光を通過しプラズマから発生するデブリを捕捉する回転可能なホイルトラップ３０と、ホイルトラップ３０の外周部を包囲してデブリを捕集するカバー部材３５と、カバー部材３５で捕集したデブリをカバー部材３５の外部へ排出するためのデブリ排出管３７と、を備える。さらに、デブリトラップ１３は、デブリ排出管３７がデブリによって閉塞することを検出する閉塞検出部を備える。【選択図】 図２</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES X-RAY TECHNIQUE |
| title | DEBRIS TRAP DEVICE AND EXTREME-ULTRAVIOLET LIGHT SOURCE DEVICE |
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