FERROELECTRIC CERAMIC
PROBLEM TO BE SOLVED: To obtain a piezoelectric film having good piezoelectric characteristics.SOLUTION: An embodiment of the present invention relates to a ferroelectric ceramic which includes a first laminated film 12 and a piezoelectric film 15 formed on the first laminated film 12. In the first...
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| creator | FURUYAMA KOICHI HONDA YUJI KIJIMA TAKESHI |
| description | PROBLEM TO BE SOLVED: To obtain a piezoelectric film having good piezoelectric characteristics.SOLUTION: An embodiment of the present invention relates to a ferroelectric ceramic which includes a first laminated film 12 and a piezoelectric film 15 formed on the first laminated film 12. In the first laminated film, a first ZrOfilm 122 and an XOfilm 123 are formed, in order, by a repetition of N times, and a second ZrOfilm 124 is formed on the film formed by the repetition of N times, where the X represents Ca, mg or Hf, the Y represents 1 or 2, and the N represents an integer of 1 or more. The ratio of X/(Zr+X) of the first laminated film is preferably less than 33%.
【課題】良好な圧電特性を有する圧電体膜を得ることを課題とする。【解決手段】本発明の一態様は、第１積層膜１２上に形成された圧電体膜１５と、を具備し、前記第１積層膜は、第１のＺｒＯ２膜１２２とＸＯＹ膜１２３が順次Ｎ回繰り返して形成され、前記Ｎ回繰り返して形成された膜上に第２のＺｒＯ２膜１２４が形成されたものであり、前記Ｘは、Ｃａ、ＭｇまたはＨｆであり、前記Ｙは１または２であり、前記Ｎは１以上の整数である強誘電体セラミックスである。前記第１積層膜のＸ／（Ｚｒ＋Ｘ）の比率は３３％未満であるとよい。【選択図】図１ |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2016009758A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2016009758A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2016009758A3</originalsourceid><addsrcrecordid>eNrjZBB1cw0K8nf1cXUOCfJ0VnB2DXL09XTmYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBoZmBgaW5qYWjsZEKQIA1CIfWQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>FERROELECTRIC CERAMIC</title><source>esp@cenet</source><creator>FURUYAMA KOICHI ; HONDA YUJI ; KIJIMA TAKESHI</creator><creatorcontrib>FURUYAMA KOICHI ; HONDA YUJI ; KIJIMA TAKESHI</creatorcontrib><description>PROBLEM TO BE SOLVED: To obtain a piezoelectric film having good piezoelectric characteristics.SOLUTION: An embodiment of the present invention relates to a ferroelectric ceramic which includes a first laminated film 12 and a piezoelectric film 15 formed on the first laminated film 12. In the first laminated film, a first ZrOfilm 122 and an XOfilm 123 are formed, in order, by a repetition of N times, and a second ZrOfilm 124 is formed on the film formed by the repetition of N times, where the X represents Ca, mg or Hf, the Y represents 1 or 2, and the N represents an integer of 1 or more. The ratio of X/(Zr+X) of the first laminated film is preferably less than 33%.
【課題】良好な圧電特性を有する圧電体膜を得ることを課題とする。【解決手段】本発明の一態様は、第１積層膜１２上に形成された圧電体膜１５と、を具備し、前記第１積層膜は、第１のＺｒＯ２膜１２２とＸＯＹ膜１２３が順次Ｎ回繰り返して形成され、前記Ｎ回繰り返して形成された膜上に第２のＺｒＯ２膜１２４が形成されたものであり、前記Ｘは、Ｃａ、ＭｇまたはＨｆであり、前記Ｙは１または２であり、前記Ｎは１以上の整数である強誘電体セラミックスである。前記第１積層膜のＸ／（Ｚｒ＋Ｘ）の比率は３３％未満であるとよい。【選択図】図１</description><language>eng ; jpn</language><subject>ARTIFICIAL STONE ; CEMENTS ; CERAMICS ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS ; CONCRETE ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; LIME, MAGNESIA ; METALLURGY ; REFRACTORIES ; SLAG ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; TREATMENT OF NATURAL STONE</subject><creationdate>2016</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160118&DB=EPODOC&CC=JP&NR=2016009758A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160118&DB=EPODOC&CC=JP&NR=2016009758A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>FURUYAMA KOICHI</creatorcontrib><creatorcontrib>HONDA YUJI</creatorcontrib><creatorcontrib>KIJIMA TAKESHI</creatorcontrib><title>FERROELECTRIC CERAMIC</title><description>PROBLEM TO BE SOLVED: To obtain a piezoelectric film having good piezoelectric characteristics.SOLUTION: An embodiment of the present invention relates to a ferroelectric ceramic which includes a first laminated film 12 and a piezoelectric film 15 formed on the first laminated film 12. In the first laminated film, a first ZrOfilm 122 and an XOfilm 123 are formed, in order, by a repetition of N times, and a second ZrOfilm 124 is formed on the film formed by the repetition of N times, where the X represents Ca, mg or Hf, the Y represents 1 or 2, and the N represents an integer of 1 or more. The ratio of X/(Zr+X) of the first laminated film is preferably less than 33%.
【課題】良好な圧電特性を有する圧電体膜を得ることを課題とする。【解決手段】本発明の一態様は、第１積層膜１２上に形成された圧電体膜１５と、を具備し、前記第１積層膜は、第１のＺｒＯ２膜１２２とＸＯＹ膜１２３が順次Ｎ回繰り返して形成され、前記Ｎ回繰り返して形成された膜上に第２のＺｒＯ２膜１２４が形成されたものであり、前記Ｘは、Ｃａ、ＭｇまたはＨｆであり、前記Ｙは１または２であり、前記Ｎは１以上の整数である強誘電体セラミックスである。前記第１積層膜のＸ／（Ｚｒ＋Ｘ）の比率は３３％未満であるとよい。【選択図】図１</description><subject>ARTIFICIAL STONE</subject><subject>CEMENTS</subject><subject>CERAMICS</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS</subject><subject>CONCRETE</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>LIME, MAGNESIA</subject><subject>METALLURGY</subject><subject>REFRACTORIES</subject><subject>SLAG</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>TREATMENT OF NATURAL STONE</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2016</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBB1cw0K8nf1cXUOCfJ0VnB2DXL09XTmYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBoZmBgaW5qYWjsZEKQIA1CIfWQ</recordid><startdate>20160118</startdate><enddate>20160118</enddate><creator>FURUYAMA KOICHI</creator><creator>HONDA YUJI</creator><creator>KIJIMA TAKESHI</creator><scope>EVB</scope></search><sort><creationdate>20160118</creationdate><title>FERROELECTRIC CERAMIC</title><author>FURUYAMA KOICHI ; HONDA YUJI ; KIJIMA TAKESHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2016009758A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2016</creationdate><topic>ARTIFICIAL STONE</topic><topic>CEMENTS</topic><topic>CERAMICS</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS</topic><topic>CONCRETE</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>LIME, MAGNESIA</topic><topic>METALLURGY</topic><topic>REFRACTORIES</topic><topic>SLAG</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>TREATMENT OF NATURAL STONE</topic><toplevel>online_resources</toplevel><creatorcontrib>FURUYAMA KOICHI</creatorcontrib><creatorcontrib>HONDA YUJI</creatorcontrib><creatorcontrib>KIJIMA TAKESHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>FURUYAMA KOICHI</au><au>HONDA YUJI</au><au>KIJIMA TAKESHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>FERROELECTRIC CERAMIC</title><date>2016-01-18</date><risdate>2016</risdate><abstract>PROBLEM TO BE SOLVED: To obtain a piezoelectric film having good piezoelectric characteristics.SOLUTION: An embodiment of the present invention relates to a ferroelectric ceramic which includes a first laminated film 12 and a piezoelectric film 15 formed on the first laminated film 12. In the first laminated film, a first ZrOfilm 122 and an XOfilm 123 are formed, in order, by a repetition of N times, and a second ZrOfilm 124 is formed on the film formed by the repetition of N times, where the X represents Ca, mg or Hf, the Y represents 1 or 2, and the N represents an integer of 1 or more. The ratio of X/(Zr+X) of the first laminated film is preferably less than 33%.
【課題】良好な圧電特性を有する圧電体膜を得ることを課題とする。【解決手段】本発明の一態様は、第１積層膜１２上に形成された圧電体膜１５と、を具備し、前記第１積層膜は、第１のＺｒＯ２膜１２２とＸＯＹ膜１２３が順次Ｎ回繰り返して形成され、前記Ｎ回繰り返して形成された膜上に第２のＺｒＯ２膜１２４が形成されたものであり、前記Ｘは、Ｃａ、ＭｇまたはＨｆであり、前記Ｙは１または２であり、前記Ｎは１以上の整数である強誘電体セラミックスである。前記第１積層膜のＸ／（Ｚｒ＋Ｘ）の比率は３３％未満であるとよい。【選択図】図１</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | ARTIFICIAL STONE CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE |
| title | FERROELECTRIC CERAMIC |
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