DISPLACEMENT DETECTOR, APPARATUS FOR PROCESSING SUBSTRATE, METHOD FOR DETECTING DISPLACEMENT, AND METHOD FOR PROCESSING SUBSTRATE
PROBLEM TO BE SOLVED: To provide a displacement detector that have a high degree of freedom in arranging imaging means, and can detect the displacement of an object to be positioned by imaging from a single imaging direction when the object to be positioned is imaged and the displacement from a refe...
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| creator | KADOMA HISAAKI |
| description | PROBLEM TO BE SOLVED: To provide a displacement detector that have a high degree of freedom in arranging imaging means, and can detect the displacement of an object to be positioned by imaging from a single imaging direction when the object to be positioned is imaged and the displacement from a reference position is detected, and to provide an apparatus for processing a substrate, a method for detecting displacement, and a method for processing a substrate.SOLUTION: In order to detect the displacement of a nozzle 53 moving in the approaching/separating direction from a camera 72, the imaging direction Di of the camera 72 is made oblique so as to cross the movement plane of the nozzle 53. In an imaged image IM, the displacement of the nozzle 53 is reflected as vertical movement, and the position of the nozzle 53 in the image is detected by pattern matching processing. Thus, the displacement of the nozzle 53 having a component of the depth direction of the image is detected.
【課題】位置決め対象物を撮像して基準位置からの変位を検出する際、単一の撮像方向からの撮像で位置決め対象物の変位を検出することができ、また撮像手段の配置の自由度の高い変位検出装置、基板処理装置、変位検出方法および基板処理方法を提供する。【解決手段】カメラ７２に対し接近・離間方向に移動するノズル５３の変位を検出するために、カメラ７２の撮像方向Ｄｉをノズル５３の移動平面に交わるように斜め方向とする。撮像された画像ＩＭでは、ノズル５３の変位が上下方向の動きとなって反映され、パターンマッチング処理により画像内でノズル５３の位置検出を行うことで、画像の奥行き方向の成分を有するノズル５３の変位を検出する。【選択図】図１０ |
| format | Patent |
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【課題】位置決め対象物を撮像して基準位置からの変位を検出する際、単一の撮像方向からの撮像で位置決め対象物の変位を検出することができ、また撮像手段の配置の自由度の高い変位検出装置、基板処理装置、変位検出方法および基板処理方法を提供する。【解決手段】カメラ７２に対し接近・離間方向に移動するノズル５３の変位を検出するために、カメラ７２の撮像方向Ｄｉをノズル５３の移動平面に交わるように斜め方向とする。撮像された画像ＩＭでは、ノズル５３の変位が上下方向の動きとなって反映され、パターンマッチング処理により画像内でノズル５３の位置検出を行うことで、画像の奥行き方向の成分を有するノズル５３の変位を検出する。【選択図】図１０</description><language>eng ; jpn</language><subject>MEASURING ; MEASURING ANGLES ; MEASURING AREAS ; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ; PHYSICS ; TESTING</subject><creationdate>2015</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150824&DB=EPODOC&CC=JP&NR=2015152475A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150824&DB=EPODOC&CC=JP&NR=2015152475A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KADOMA HISAAKI</creatorcontrib><title>DISPLACEMENT DETECTOR, APPARATUS FOR PROCESSING SUBSTRATE, METHOD FOR DETECTING DISPLACEMENT, AND METHOD FOR PROCESSING SUBSTRATE</title><description>PROBLEM TO BE SOLVED: To provide a displacement detector that have a high degree of freedom in arranging imaging means, and can detect the displacement of an object to be positioned by imaging from a single imaging direction when the object to be positioned is imaged and the displacement from a reference position is detected, and to provide an apparatus for processing a substrate, a method for detecting displacement, and a method for processing a substrate.SOLUTION: In order to detect the displacement of a nozzle 53 moving in the approaching/separating direction from a camera 72, the imaging direction Di of the camera 72 is made oblique so as to cross the movement plane of the nozzle 53. In an imaged image IM, the displacement of the nozzle 53 is reflected as vertical movement, and the position of the nozzle 53 in the image is detected by pattern matching processing. Thus, the displacement of the nozzle 53 having a component of the depth direction of the image is detected.
【課題】位置決め対象物を撮像して基準位置からの変位を検出する際、単一の撮像方向からの撮像で位置決め対象物の変位を検出することができ、また撮像手段の配置の自由度の高い変位検出装置、基板処理装置、変位検出方法および基板処理方法を提供する。【解決手段】カメラ７２に対し接近・離間方向に移動するノズル５３の変位を検出するために、カメラ７２の撮像方向Ｄｉをノズル５３の移動平面に交わるように斜め方向とする。撮像された画像ＩＭでは、ノズル５３の変位が上下方向の動きとなって反映され、パターンマッチング処理により画像内でノズル５３の位置検出を行うことで、画像の奥行き方向の成分を有するノズル５３の変位を検出する。【選択図】図１０</description><subject>MEASURING</subject><subject>MEASURING ANGLES</subject><subject>MEASURING AREAS</subject><subject>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</subject><subject>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZGh08QwO8HF0dvV19QtRcHENcXUO8Q_SUXAMCHAMcgwJDVZw8w9SCAjyd3YNDvb0c1cIDnUKDgHKuOoo-LqGePi7gBVANILkkc0DGuPngqwMmzk8DKxpiTnFqbxQmptByc01xNlDN7UgPz61uCAxOTUvtSTeK8DIwNDU0NTIxNzU0ZgoRQBSrD0y</recordid><startdate>20150824</startdate><enddate>20150824</enddate><creator>KADOMA HISAAKI</creator><scope>EVB</scope></search><sort><creationdate>20150824</creationdate><title>DISPLACEMENT DETECTOR, APPARATUS FOR PROCESSING SUBSTRATE, METHOD FOR DETECTING DISPLACEMENT, AND METHOD FOR PROCESSING SUBSTRATE</title><author>KADOMA HISAAKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2015152475A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2015</creationdate><topic>MEASURING</topic><topic>MEASURING ANGLES</topic><topic>MEASURING AREAS</topic><topic>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</topic><topic>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>KADOMA HISAAKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KADOMA HISAAKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>DISPLACEMENT DETECTOR, APPARATUS FOR PROCESSING SUBSTRATE, METHOD FOR DETECTING DISPLACEMENT, AND METHOD FOR PROCESSING SUBSTRATE</title><date>2015-08-24</date><risdate>2015</risdate><abstract>PROBLEM TO BE SOLVED: To provide a displacement detector that have a high degree of freedom in arranging imaging means, and can detect the displacement of an object to be positioned by imaging from a single imaging direction when the object to be positioned is imaged and the displacement from a reference position is detected, and to provide an apparatus for processing a substrate, a method for detecting displacement, and a method for processing a substrate.SOLUTION: In order to detect the displacement of a nozzle 53 moving in the approaching/separating direction from a camera 72, the imaging direction Di of the camera 72 is made oblique so as to cross the movement plane of the nozzle 53. In an imaged image IM, the displacement of the nozzle 53 is reflected as vertical movement, and the position of the nozzle 53 in the image is detected by pattern matching processing. Thus, the displacement of the nozzle 53 having a component of the depth direction of the image is detected.
【課題】位置決め対象物を撮像して基準位置からの変位を検出する際、単一の撮像方向からの撮像で位置決め対象物の変位を検出することができ、また撮像手段の配置の自由度の高い変位検出装置、基板処理装置、変位検出方法および基板処理方法を提供する。【解決手段】カメラ７２に対し接近・離間方向に移動するノズル５３の変位を検出するために、カメラ７２の撮像方向Ｄｉをノズル５３の移動平面に交わるように斜め方向とする。撮像された画像ＩＭでは、ノズル５３の変位が上下方向の動きとなって反映され、パターンマッチング処理により画像内でノズル５３の位置検出を行うことで、画像の奥行き方向の成分を有するノズル５３の変位を検出する。【選択図】図１０</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING |
| title | DISPLACEMENT DETECTOR, APPARATUS FOR PROCESSING SUBSTRATE, METHOD FOR DETECTING DISPLACEMENT, AND METHOD FOR PROCESSING SUBSTRATE |
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