MULTIAXIAL SENSOR

PROBLEM TO BE SOLVED: To provide a multiaxial sensor which facilitates detection of a physical amount in a multiaxial direction and downsizing and capable of correcting an error due to another-axis sensitivity and improving a detection accuracy .SOLUTION: A sensor 10 is fluctuated in electrostatic c...

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Bibliographische Detailangaben
1. Verfasser: OKAMI TAKESHI
Format: Patent
Sprache:eng ; jpn
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