MULTIAXIAL SENSOR
PROBLEM TO BE SOLVED: To provide a multiaxial sensor which facilitates detection of a physical amount in a multiaxial direction and downsizing and capable of correcting an error due to another-axis sensitivity and improving a detection accuracy .SOLUTION: A sensor 10 is fluctuated in electrostatic c...
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| creator | OKAMI TAKESHI |
| description | PROBLEM TO BE SOLVED: To provide a multiaxial sensor which facilitates detection of a physical amount in a multiaxial direction and downsizing and capable of correcting an error due to another-axis sensitivity and improving a detection accuracy .SOLUTION: A sensor 10 is fluctuated in electrostatic capacity between first fixed electrodes 31, 32, 35, 36 and movable electrodes 26, 28 when a weight part 11 is fluctuated in a Y direction by Coriolis force according to an angular rotation speed of a Z axis. The sensor 10 is also fluctuated in the electrostatic capacity between first and second blade parts 23, 24 and second fixed electrodes 33, 38 formed on a substrate 14. When an angular rotation speed of a Z axis is detected in the sensor 10 which is a multiaxial sensor, correction processing is performed by using the detection result of an angular rotation speed of the Y axis which is another axis.
【課題】多軸方向の物理量を検出可能としセンサの小型化が図れ、且つ他軸感度による誤差を補正し検出精度の向上が図れる多軸センサを提供すること。【解決手段】センサ１０は、Ｚ軸回転の角速度に応じたコリオリ力によって錘部１１がＹ方向に変動すると、第１固定電極３１，３２，３５，３６と可動電極部２６，２８との間の静電容量が変動する。また、センサ１０は、Ｙ軸回転の角速度に応じたコリオリ力によって錘部１１の第１及び第２翼部２３，２４がＺ方向に回転すると、第１及び第２翼部２３，２４と基板１４上に形成された第２固定電極３３，３８との間の静電容量が変動する。この多軸センサであるセンサ１０において、Ｚ軸回転の角速度を検出する際に、他軸であるＹ軸回転の角速度の検出結果を用いて補正処理を行う構成とした。【選択図】図１ |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2015125124A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2015125124A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2015125124A3</originalsourceid><addsrcrecordid>eNrjZBD0DfUJ8XSM8HT0UQh29Qv2D-JhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGhqaGRkBk4mhMlCIAaIweTg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MULTIAXIAL SENSOR</title><source>esp@cenet</source><creator>OKAMI TAKESHI</creator><creatorcontrib>OKAMI TAKESHI</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide a multiaxial sensor which facilitates detection of a physical amount in a multiaxial direction and downsizing and capable of correcting an error due to another-axis sensitivity and improving a detection accuracy .SOLUTION: A sensor 10 is fluctuated in electrostatic capacity between first fixed electrodes 31, 32, 35, 36 and movable electrodes 26, 28 when a weight part 11 is fluctuated in a Y direction by Coriolis force according to an angular rotation speed of a Z axis. The sensor 10 is also fluctuated in the electrostatic capacity between first and second blade parts 23, 24 and second fixed electrodes 33, 38 formed on a substrate 14. When an angular rotation speed of a Z axis is detected in the sensor 10 which is a multiaxial sensor, correction processing is performed by using the detection result of an angular rotation speed of the Y axis which is another axis.
【課題】多軸方向の物理量を検出可能としセンサの小型化が図れ、且つ他軸感度による誤差を補正し検出精度の向上が図れる多軸センサを提供すること。【解決手段】センサ１０は、Ｚ軸回転の角速度に応じたコリオリ力によって錘部１１がＹ方向に変動すると、第１固定電極３１，３２，３５，３６と可動電極部２６，２８との間の静電容量が変動する。また、センサ１０は、Ｙ軸回転の角速度に応じたコリオリ力によって錘部１１の第１及び第２翼部２３，２４がＺ方向に回転すると、第１及び第２翼部２３，２４と基板１４上に形成された第２固定電極３３，３８との間の静電容量が変動する。この多軸センサであるセンサ１０において、Ｚ軸回転の角速度を検出する際に、他軸であるＹ軸回転の角速度の検出結果を用いて補正処理を行う構成とした。【選択図】図１</description><language>eng ; jpn</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GYROSCOPIC INSTRUMENTS ; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT ; MEASURING ; MEASURING DISTANCES, LEVELS OR BEARINGS ; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; NAVIGATION ; PERFORMING OPERATIONS ; PHOTOGRAMMETRY OR VIDEOGRAMMETRY ; PHYSICS ; SEMICONDUCTOR DEVICES ; SURVEYING ; TESTING ; TRANSPORTING</subject><creationdate>2015</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150706&DB=EPODOC&CC=JP&NR=2015125124A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150706&DB=EPODOC&CC=JP&NR=2015125124A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>OKAMI TAKESHI</creatorcontrib><title>MULTIAXIAL SENSOR</title><description>PROBLEM TO BE SOLVED: To provide a multiaxial sensor which facilitates detection of a physical amount in a multiaxial direction and downsizing and capable of correcting an error due to another-axis sensitivity and improving a detection accuracy .SOLUTION: A sensor 10 is fluctuated in electrostatic capacity between first fixed electrodes 31, 32, 35, 36 and movable electrodes 26, 28 when a weight part 11 is fluctuated in a Y direction by Coriolis force according to an angular rotation speed of a Z axis. The sensor 10 is also fluctuated in the electrostatic capacity between first and second blade parts 23, 24 and second fixed electrodes 33, 38 formed on a substrate 14. When an angular rotation speed of a Z axis is detected in the sensor 10 which is a multiaxial sensor, correction processing is performed by using the detection result of an angular rotation speed of the Y axis which is another axis.
【課題】多軸方向の物理量を検出可能としセンサの小型化が図れ、且つ他軸感度による誤差を補正し検出精度の向上が図れる多軸センサを提供すること。【解決手段】センサ１０は、Ｚ軸回転の角速度に応じたコリオリ力によって錘部１１がＹ方向に変動すると、第１固定電極３１，３２，３５，３６と可動電極部２６，２８との間の静電容量が変動する。また、センサ１０は、Ｙ軸回転の角速度に応じたコリオリ力によって錘部１１の第１及び第２翼部２３，２４がＺ方向に回転すると、第１及び第２翼部２３，２４と基板１４上に形成された第２固定電極３３，３８との間の静電容量が変動する。この多軸センサであるセンサ１０において、Ｚ軸回転の角速度を検出する際に、他軸であるＹ軸回転の角速度の検出結果を用いて補正処理を行う構成とした。【選択図】図１</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>GYROSCOPIC INSTRUMENTS</subject><subject>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</subject><subject>MEASURING</subject><subject>MEASURING DISTANCES, LEVELS OR BEARINGS</subject><subject>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>NAVIGATION</subject><subject>PERFORMING OPERATIONS</subject><subject>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SURVEYING</subject><subject>TESTING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBD0DfUJ8XSM8HT0UQh29Qv2D-JhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGhqaGRkBk4mhMlCIAaIweTg</recordid><startdate>20150706</startdate><enddate>20150706</enddate><creator>OKAMI TAKESHI</creator><scope>EVB</scope></search><sort><creationdate>20150706</creationdate><title>MULTIAXIAL SENSOR</title><author>OKAMI TAKESHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2015125124A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2015</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>GYROSCOPIC INSTRUMENTS</topic><topic>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</topic><topic>MEASURING</topic><topic>MEASURING DISTANCES, LEVELS OR BEARINGS</topic><topic>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>NAVIGATION</topic><topic>PERFORMING OPERATIONS</topic><topic>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SURVEYING</topic><topic>TESTING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>OKAMI TAKESHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>OKAMI TAKESHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MULTIAXIAL SENSOR</title><date>2015-07-06</date><risdate>2015</risdate><abstract>PROBLEM TO BE SOLVED: To provide a multiaxial sensor which facilitates detection of a physical amount in a multiaxial direction and downsizing and capable of correcting an error due to another-axis sensitivity and improving a detection accuracy .SOLUTION: A sensor 10 is fluctuated in electrostatic capacity between first fixed electrodes 31, 32, 35, 36 and movable electrodes 26, 28 when a weight part 11 is fluctuated in a Y direction by Coriolis force according to an angular rotation speed of a Z axis. The sensor 10 is also fluctuated in the electrostatic capacity between first and second blade parts 23, 24 and second fixed electrodes 33, 38 formed on a substrate 14. When an angular rotation speed of a Z axis is detected in the sensor 10 which is a multiaxial sensor, correction processing is performed by using the detection result of an angular rotation speed of the Y axis which is another axis.
【課題】多軸方向の物理量を検出可能としセンサの小型化が図れ、且つ他軸感度による誤差を補正し検出精度の向上が図れる多軸センサを提供すること。【解決手段】センサ１０は、Ｚ軸回転の角速度に応じたコリオリ力によって錘部１１がＹ方向に変動すると、第１固定電極３１，３２，３５，３６と可動電極部２６，２８との間の静電容量が変動する。また、センサ１０は、Ｙ軸回転の角速度に応じたコリオリ力によって錘部１１の第１及び第２翼部２３，２４がＺ方向に回転すると、第１及び第２翼部２３，２４と基板１４上に形成された第２固定電極３３，３８との間の静電容量が変動する。この多軸センサであるセンサ１０において、Ｚ軸回転の角速度を検出する際に、他軸であるＹ軸回転の角速度の検出結果を用いて補正処理を行う構成とした。【選択図】図１</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GYROSCOPIC INSTRUMENTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NAVIGATION PERFORMING OPERATIONS PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SEMICONDUCTOR DEVICES SURVEYING TESTING TRANSPORTING |
| title | MULTIAXIAL SENSOR |
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