PROBER

PROBLEM TO BE SOLVED: To provide a prober capable of enhancing measurement accuracy and reliability of a wafer level inspection in high-frequency measurement and dynamic measurement without being affected by temperature change of a wafer chuck.SOLUTION: A prober comprises: a wafer chuck having a con...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AOKI KAZUHISA, MORI TOSHIRO, YAMAGUCHI AKIRA, MURAKAMI KONOSUKE, SHIGESAWA YUJI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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