SUBSTRATE FLOATING DEVICE

PROBLEM TO BE SOLVED: To provide a substrate floating device capable of rapidly detecting sound noise generated from a diaphragm.SOLUTION: A substrate floating device includes: a floating unit 2 which has a diaphragm part 11 placing a substrate W thereon and an ultrasonic wave generation part 12 connected to the diaphragm part 11 and giving the ultrasonic vibration to the diaphragm part 11, and which floats the substrate W by the ultrasonic vibration; and a sound sensor part 3 which is provided in the traveling direction of sound emitted from the diaphragm part 11 and which detects sound in an audible range. 【課題】振動板から生じた騒音を迅速に検知することができる基板浮上装置を提供する。【解決手段】基板Ｗを載置する振動板部１１と、振動板部１１に接続され、振動板部１１に超音波振動を与える超音波発生部１２と、を有し、振動板部１１上の基板Ｗを超音波振動浮上させる浮上ユニット２と、振動板部１１から発せられる音の進行方向に設けられ、可聴域の音を検知する音センサ部３と、を備える。【選択図】図１