DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD FOR TRANSPARENT TABULAR BODY

PROBLEM TO BE SOLVED: To provide a defect inspection device and a defect inspection method for a transparent tabular body, which are capable of accurately measuring a size of a defect existing in a transparent tabular body.SOLUTION: A defect inspection device 10 for a transparent tabular body uses a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KOBAYASHI TAKASHI, KATO MUNEHISA
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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