HIGH FREQUENCY POWER SUPPLY DEVICE

PROBLEM TO BE SOLVED: To solve such a problem in a high frequency power supply system including a plurality of high frequency power supply devices for supplying traveling wave power to a common load, that even if a high frequency signal is given from a common oscillator 100, some difference may possibly occur in the output frequency of each high frequency power supply device.SOLUTION: Traveling wave voltage VF of a first high frequency power supply device 110 is detected, and a traveling wave detection signal Vis sent to a second high frequency power supply device 120. In the high frequency power supply device 120, the frequency information F(t) of an input signal V, from which the harmonic components are removed by means of a filter 1, is detected by a frequency information detection unit 2 and sent, as digital data, to a high frequency signal generator 3. A high frequency signal having a frequency indicated by the frequency information is generated in the high frequency signal generator 3, and amplified in a traveling wave power output unit 4 thus outputting a traveling wave power. Consequently, the output frequency of the high frequency power supply device 120 can be matched to that of the high frequency power supply device 110. 【課題】 進行波電力を共通の負荷に供給する複数の高周波電源装置を備えた高周波電力供給システムでは、たとえ共通の発振器１００から高周波信号が与えられても、各高周波電源装置の出力周波数に若干の違いが生じる可能性がある。【解決手段】 第１の高周波電源装置１１０の進行波電圧ＶＦを検出し、進行波検出信号Ｖｆを第２の高周波電源装置１２０に送る。高周波電源装置１２０では、フィルタ１で高調波成分を除去した入力信号Ｖｉｎの周波数情報Ｆａｖｅ［ｔ］を周波数情報検出部２で検出し、デジタルデータで高周波信号発生器３に送る。高周波信号発生器３では、周波数情報が示す周波数を有する高周波信号を発生させ、進行波電力出力部４で増幅し、進行波電力を出力する。これにより高周波電源装置１２０の出力周波数を高周波電源装置１１０の出力周波数に合わせることができる。【選択図】 図２