INFRARED SENSOR
PROBLEM TO BE SOLVED: To provide an infrared sensor capable of maintaining high sensitivity and reducing deterioration of an infrared absorption film.SOLUTION: An infrared sensor includes: a substrate; a cavity that is formed inside the substrate; an absorption film absorption layer 9 that is in a m...
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| creator | KUROKI KOJI MATSUO YUTAKA KAGAYA YASUNAGA KOMURO EIJU |
| description | PROBLEM TO BE SOLVED: To provide an infrared sensor capable of maintaining high sensitivity and reducing deterioration of an infrared absorption film.SOLUTION: An infrared sensor includes: a substrate; a cavity that is formed inside the substrate; an absorption film absorption layer 9 that is in a membrane region corresponding to the cavity and in which a base material formed on the upper part of a heat sensitive element is a first organic material; and an absorption film protective layer 10 that is formed on the absorption film absorption layer and is a second organic material for coating the absorption film absorption layer. In a direction orthogonal to the lamination direction of the absorption film absorption layer and absorption film protective layer, the end part of the absorption film protective layer is formed inside the membrane region. |
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| subjects | COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING |
| title | INFRARED SENSOR |
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