REMOVAL METHOD OF METAL DEPOSIT AND REMOVAL DEVICE OF METAL DEPOSIT
PROBLEM TO BE SOLVED: To provide a removal method of metal deposit and a removal device of metal deposit capable of efficiently removing the metal deposit.SOLUTION: A technique which removes metal deposit from an object to be treated by scarfing the metal deposit deposited on the object to be treate...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a removal method of metal deposit and a removal device of metal deposit capable of efficiently removing the metal deposit.SOLUTION: A technique which removes metal deposit from an object to be treated by scarfing the metal deposit deposited on the object to be treated is provided. Therein, at least one side of oxygen molecule and electron, and oxygen negative ion is supplied to deposition part of the metal deposit. Thereby, the reactivity of oxygen gas itself used for removal of the metal deposit is improved and the metal deposit can be more efficiently removed. |
---|