DEVICE AND METHOD FOR FORMING PATTERN, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING DISPLAY PANEL

PROBLEM TO BE SOLVED: To carry out drawing coordinate position correction perpendicular to a scanning direction in high definition by adding a small-scale circuit structure without increasing a load for a drawing process, and to perform a high quality pattern formation at a high throughput.SOLUTION:...

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Bibliographische Detailangaben

Hauptverfasser:	MOCHIZUKI MASAAKI, HONDA HIDEYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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