DEVICE AND METHOD FOR ALIGNMENT

PROBLEM TO BE SOLVED: To provide a device and a method for alignment, in which alignment time is reduced.SOLUTION: When a processing mask 31 and a target object 32a are aligned, a relative speed for relatively moving in alignment is set to correspond to an error distance, the relative speed is deter...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIBA TOMOSHI, SAKAUCHI YUYA, NAKAO HIROTOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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