DEVICE AND METHOD FOR ALIGNMENT

DEVICE AND METHOD FOR ALIGNMENT

PROBLEM TO BE SOLVED: To provide a device and a method for alignment, in which alignment time is reduced.SOLUTION: When a processing mask 31 and a target object 32a are aligned, a relative speed for relatively moving in alignment is set to correspond to an error distance, the relative speed is deter...

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Hauptverfasser: SHIBA TOMOSHI, SAKAUCHI YUYA, NAKAO HIROTOSHI
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Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator SHIBA TOMOSHI
SAKAUCHI YUYA
NAKAO HIROTOSHI
description PROBLEM TO BE SOLVED: To provide a device and a method for alignment, in which alignment time is reduced.SOLUTION: When a processing mask 31 and a target object 32a are aligned, a relative speed for relatively moving in alignment is set to correspond to an error distance, the relative speed is determined by the error distance determined from an imaging result, an error is reduced by causing movement at the relative speed. When the error distance is shortened, the relative speed is also set to be slow, and a distance in which the processing mask 31 and the target object 32a pass is shortened. Accordingly, an alignment time is reduced.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title DEVICE AND METHOD FOR ALIGNMENT
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