SUBSTRATE SUPPORT DEVICE AND SUBSTRATE INSPECTION DEVICE

PROBLEM TO BE SOLVED: To provide a substrate support device which allows for uniform contact of a probe to the total area of both sides of a substrate, by minimizing deflection of the substrate, and to provide a substrate inspection device.SOLUTION: A substrate support device comprises a processing...

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Bibliographische Detailangaben

1. Verfasser:	TOMOI TADASHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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