SUBSTRATE SUPPORT DEVICE AND SUBSTRATE INSPECTION DEVICE

PROBLEM TO BE SOLVED: To provide a substrate support device which allows for uniform contact of a probe to the total area of both sides of a substrate, by minimizing deflection of the substrate, and to provide a substrate inspection device.SOLUTION: A substrate support device comprises a processing unit configured to support a substrate 100 while including contact members 23a, 23b capable of coming into contact with the end faces 101a, 101b of the substrate 100, and a press mechanism for pressing the contact members 23a, 23b against the end faces 101a, 101b, and performing press control for controlling the press mechanism so that the pressing force of the contact members 23a, 23b against the end faces 101a, 101b has a specified value. The processing unit performs press control by using a specified value smaller than a value causing the buckling in the substrate 100 due to the pressing by the contact members 23a, 23b, but a frictional force generated between the contact members 23a, 23b and the end faces 101a, 101b by pressing exceeds the weight of the substrate 100.