FOCUS CONTROL DEVICE AND METHOD OF THE SAME

PROBLEM TO BE SOLVED: To provide a focus device that generates a focus position signal following an error of an actual focus position even in the vicinity of a boundary of an area different in a thickness, and performs a highly accurate focus position control by the focus position signal, and to pro...

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Hauptverfasser: SEKIYA HARUTAKA, TOGASHI MITSUHIRO
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creator SEKIYA HARUTAKA
TOGASHI MITSUHIRO
description PROBLEM TO BE SOLVED: To provide a focus device that generates a focus position signal following an error of an actual focus position even in the vicinity of a boundary of an area different in a thickness, and performs a highly accurate focus position control by the focus position signal, and to provide a method that performs the highly accurate focus position control.SOLUTION: The focus control device according to the present invention comprises: an error signal correction section that performs a correction to a focus error signal indicative of an error from a focus position of an observation object to an optical system; and an area change-over detection section that, when observation areas of an optical system are changed over between an observation object area and a non-observation object area different in a height from that in the observation object area, outputs an area signal corresponding to each of the observation object area and the non-observation object area. When the area signal indicates the non-observation object area, the error signal correction section performs the correction to be a numerical value corresponding to the error from the focus position in the observation object area with respect to the focus error signal.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title FOCUS CONTROL DEVICE AND METHOD OF THE SAME
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