ETCHING APPARATUS AND ETCHING TREATMENT METHOD

PROBLEM TO BE SOLVED: To provide a contact piece for a precise electrification test, and the like by performing etching uniformly.SOLUTION: An etching apparatus for a processing object 10 which is a slender member having a resist layer formed on at least a portion of a surface thereof, performs etch...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HIROBE KOSUKE, HIRAI KENSUKE
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR CHEMISTRY ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROMOBJECTS
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