ELECTRODE CONNECTION STRUCTURE OF GRAPHENE FILM

PROBLEM TO BE SOLVED: To provide an electrode structure that suppresses peeling of an electrode that is connected to a graphene film used for an electronic device and such.SOLUTION: The electrode connection structure of a graphene film has a structure in which a conductive electrode peeling preventi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMADA TAKATOSHI, HASEGAWA MASATAKA, OKIKAWA YUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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